Superhard Ti-Si-N coatings by a hybrid system of arc ion plating and sputtering techniques

Surface and Coatings Technology

Volumn 161, Issue 2-3, 2002, Pages 243-248

  Kim, Kwang Ho ^a   Choi, Sung Ryong ^a   Yoon, Soon Young ^a  

^a Pusan National University   (South Korea)

Author keywords

Arc ion plating and sputtering; Hybrid coating system; Superhardness; Ti Si N

Indexed keywords

NITROGEN; PLATING; SILICON NITRIDE; SPUTTERING; STEEL; SURFACE ROUGHNESS; TITANIUM;

HYBRID SYSTEMS;

HARD FACING;

NITROGEN; SILICON; STEEL; TITANIUM;

COATING; HARDNESS; ION PLATING; MECHANICAL PROPERTY; SPUTTERING;

ARC ION PLATING TECHNIQUE; COMPOSITE MATERIAL; CONCENTRATION (PARAMETERS); DRY DEPOSITION; HARDNESS; LOAD CARRYING CAPACITY; MATERIAL COATING; PLATING MEDIUM; SPUTTERING TECHNIQUE;

EID: 0037010580     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00499-1     Document Type: Article

References (30)