The tribological and structural characterization of nano-structured Ti-Si-N films coated by pulsed-d.c. plasma enhanced CVD

Vacuum

Volumn 79, Issue 1-2, 2005, Pages 7-13

  Ma, Dayan ^a   Ma, Shengli ^a   Xu, Kewei ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Nano structured; Plasma enhanced CVD; Ti Si N; Wear

Indexed keywords

CHARACTERIZATION; COMPOSITION; HIGH TEMPERATURE OPERATIONS; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES; TITANIUM; TRIBOLOGY; WEAR RESISTANCE;

FEED GASES; MIXING RATIO; TI-SI-N; WEAR;

THIN FILMS;

EID: 20444380332     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.01.003     Document Type: Article

References (15)

1. S Ma, Y Li, and K Xu Surf Coat Tech 131 2000 131 135
2. N.J. Archer Thin Solid Films 80 1981 221
3. M.R. Hilton, G.J. Vandentop, M. Salmron, and G.A. Somorjai Thin Solid Films 154 1987 377
4. F.H.M. Sanders, and G.J. Verspui Thin Solid Films 161 1988 L87
5. S Li, C Zhao, X Xu, Y Shi, H Yang, and Y Xie Surf Coat Tech 43/44 1990 1007
6. D. Heim, and R. Hochreiter Surf Coat Tech 98 1998 1553 1556
7. C. Mitterer, P.H. Mayrhofer, and M. Beschliesser Surf Coat Technol 181-183 1995 189 193
8. B. Selbach, K. Schmidt, and M. Wang Thin Solid Films 188 1990 267 274
9. V Stan J Vac Sci Tech A 17 5 1999 2401 2420
10. P. Holubar, M. Jilek, and M. Sima Surf Coat Tech 120-121 1999 184 188
11. S. Li, Y. Shi, and H. Peng Plasma Chem Plasma Proc 12 3 1992 287
12. J.L. He, C.K. Chen, and M.H. Hon Wear 181-183 1995 189 193
13. S. Veprek, and S. Reiprich Thin Solid Films 268 1995 64
14. S. Veprek Surf Coat Tech 133-134 2000 152 159
15. S. Veprek, and A.S. Argon Surf Coat Tech 146-147 2001 175 182