Improvement of the performance of ZnO TFTs by low-temperature supercritical fluid technology treatment

Surface and Coatings Technology

Volumn 204, Issue 6-7, 2009, Pages 1112-1115

  Chen, Min Chen ^a   Chang, Ting Chang ^a,b   Huang, Sheng Yao ^a   Chang, Kuan Chang ^a   Huang, Hui Chun ^a   Chen, Shih Ching ^a   Lu, Jin ^a   Gan, Der Shin ^a   Ho, New Jin ^a   Young, Tai Fa ^a   Jhang, Geng Wei ^c   Tai, Ya Hsiang ^c  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^c NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Supercritical fluid; ZnO

Indexed keywords

CRYSTALLINE QUALITY; ELECTRICAL CHARACTERISTIC; HYDROGEN-RELATED DONORS; LOW TEMPERATURES; SUPERCRITICAL CO; SUPERCRITICAL FLUID TECHNOLOGY; TEM; THIN-FILM MEASUREMENT; TRANSFER CHARACTERISTICS; ZNO; ZNO FILMS; ZNO THIN FILM;

BINDING ENERGY; EFFLUENT TREATMENT; GRAIN BOUNDARIES; HYDROGEN BONDS; METALLIC FILMS; OPTICAL FILMS; SEMICONDUCTING ZINC COMPOUNDS; SUPERCRITICAL FLUIDS; THIN FILM TRANSISTORS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; WATER RECYCLING; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZINC; ZINC OXIDE;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 71849090953     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.09.050     Document Type: Article

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