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Volumn 91, Issue 1, 2007, Pages

Low-temperature method for enhancing sputter-deposited Hf O2 films with complete oxidization

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE VOLTAGE (C-V); INTERFACIAL OXIDES; PARASITIC OXIDES; PROPYL ALCOHOL;

CAPACITANCE MEASUREMENT; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; SPUTTER DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

ULTRATHIN FILMS;

EID: 36048938002 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2753762 Document Type: Article

Times cited : (35)

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