Mobility enhancement in ZnO-based TFTs by H treatment

Electrochemical and Solid-State Letters

Volumn 7, Issue 11, 2004, Pages

  Bae, H S ^a   Kim, J H ^a   Im, Seongil ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; FABRICATION; HYDROGEN; OPTIMIZATION; SPUTTER DEPOSITION; SURFACE ROUGHNESS; THERMAL EFFECTS; ZINC OXIDE;

HIGH FIELD-EFFECT MOBILITY; MOBILITY ENHANCEMENT; ROOM TEMPERATURE;

THIN FILM TRANSISTORS;

EID: 10044243640     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1808091     Document Type: Article

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