Stochastic analysis of electrostatic mems subjected to parameter variations

Journal of Microelectromechanical Systems

Volumn 18, Issue 6, 2009, Pages 1454-1468

  Agarwal, Nitin ^a   Aluru, Narayana R ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

MEMS switch; Microelectromechanical systems (MEMS) resonator; Parameter variation; Reliability; Smolyak algorithm; Sparse grid interpolation; Uncertainty propagation

Indexed keywords

MEMS SWITCHES; MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATOR; MICROELECTROMECHANICAL SYSTEMS RESONATORS; PARAMETER VARIATION; SPARSE GRID; UNCERTAINTY PROPAGATION;

COMPOSITE MICROMECHANICS; ELECTRIC SWITCHES; ELECTROSTATIC DEVICES; ELECTROSTATICS; INTERPOLATION; LARGE SCALE SYSTEMS; MECHATRONICS; MEMS; MONTE CARLO METHODS; NATURAL FREQUENCIES; PROBABILITY DENSITY FUNCTION; RELIABILITY; RESONATORS; STOCHASTIC SYSTEMS; UNCERTAINTY ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 71549162596     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2034612     Document Type: Article

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