A methodology for analyzing the variability in the performance of a MEMS actuator made from a novel ceramic

Sensors and Actuators, A: Physical

Volumn 116, Issue 2, 2004, Pages 336-344

  Kong, J S ^a   Frangopol, D M ^b   Raulli, M ^b   Maute, K ^b   Saravanan, R A ^b   Liew, L A ^b   Raj, R ^b  

^a Korea University   (South Korea)

^b UCB 450   (United States)

Author keywords

Electrostatic actuator; Finite element analysis; Microelectromechanical system; Monte Carlo simulation

Indexed keywords

CERAMIC MATERIALS; ELECTROSTATIC ACTUATORS; FINITE ELEMENT METHOD; GEOMETRY; MONTE CARLO METHODS; PERFORMANCE; POLYMERS; PROBABILITY DISTRIBUTIONS; RELIABILITY;

ELECTROSTATIC ACTUATION; MICROELECTROMECHANICAL SYSTEMS; POLYMER DERIVED CERAMICS (PDC); SILICON CARBONITRIDE;

MICROELECTROMECHANICAL DEVICES;

EID: 4544373104     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.05.001     Document Type: Article

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