Hybrid ultra-compact 4 th order band-pass filters based on piezoelectric aln contour-mode mems resonators

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2008, Pages 324-327

  Zuo, C ^a   Sinha, N ^a   Perez, C R ^a   Mahameed, R ^a   Pisani, M B ^a   Piazza, G ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINUM NITRIDE; BANDWIDTH; ELECTROMECHANICAL FILTERS; III-V SEMICONDUCTORS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PIEZOELECTRICITY; RESONATORS; SIGNAL RECEIVERS; SOLID-STATE SENSORS;

1DB COMPRESSION POINT; ALUMINUM NITRIDE (ALN); FRACTIONAL BANDWIDTHS; INPUT THIRD-ORDER INTERCEPT POINTS; INTERMEDIATE FREQUENCIES; MICRO-ELECTRO-MECHANICAL; OUT OF BAND REJECTION; WIRELESS COMMUNICATION SYSTEM;

BANDPASS FILTERS;

EID: 70449510268     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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