AlN contour-mode vibrating RF MEMS for next generation wireless communications

ESSDERC 2006 - Proceedings of the 36th European Solid-State Device Research Conference

Volumn , Issue , 2006, Pages 61-64

  Piazza, Gianluca ^a   Stephanou, Philip J ^b   Pisano, Albert P ^c  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b Harmonic Devices Inc   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; MICROPROCESSOR CHIPS; RESONATORS; WIRELESS NETWORKS;

MOTIONAL RESISTANCE; PIEZOELECTRIC RESONATORS; WIRELESS COMMUNICATIONS;

MEMS;

EID: 70349219597     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDER.2006.307638     Document Type: Conference Paper

References (11)

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