Research progress in surface modification and micro-tribological behavior of single crystal silicon

Mocaxue Xuebao/Tribology

Volumn 24, Issue 4, 2004, Pages 382-385

  Sun, Rong ^a,b   Xu, Tao ^a   Xue, Qun Ji ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b HENAN UNIVERSITY   (China)

Author keywords

Micro tribological behavior; Microelectromechanical system; Nanoelectromechanical system; Silicon; Surface modification

Indexed keywords

CRYSTALLIZATION; ION IMPLANTATION; MODIFICATION; NANOTECHNOLOGY; SINGLE CRYSTALS; SURFACES;

MICROELECTROMECHANICAL SYSTEM; MICROTRIBOLOGICAL BEHAVIOR; NANOELECTROMECHANICAL SYSTEM; SURFACE MODIFICATION;

SILICON;

EID: 7044286035     PISSN: 10040595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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