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Volumn 21, Issue 1, 2001, Pages 6-9
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Effect of ion implantation on the interface chemical states and tribological behavior of amorphous carbon film on SiO2 substrate
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Author keywords
Amorphous carbon film; Ion beam mixing; Tribological behavior
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Indexed keywords
ADHESION;
AMORPHOUS FILMS;
CARBON;
SILICA;
TRIBOLOGY;
AMORPHOUS CARBON FILM;
ANTIWEAR LIFE;
ION BEAM MIXING;
TRIBOLOGICAL BEHAVIOR;
ION IMPLANTATION;
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EID: 0034883048
PISSN: 10040595
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (2)
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References (8)
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