Investigations on the friction force anisotropy of the silicon lattice

Wear

Volumn 254, Issue 11, 2003, Pages 1122-1126

  Gatzen, H H ^a   Beck, M ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

Anisotropy; Coefficient of friction; Silicon lattice

Indexed keywords

ANISOTROPY; CRYSTAL ORIENTATION; FRICTION; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; SINGLE CRYSTALS; THIN FILMS;

FRICTION BEARINGS;

SILICON WAFERS;

EXPERIMENTAL METHOD; FRICTION; SILICON; SLIDING BEARING; TRIBOLOGY;

EID: 0042856284     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(03)00323-5     Document Type: Article

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