Tribological properties of carbon- and nitrogen-implanted Si(100)

Wear

Volumn 205, Issue 1-2, 1997, Pages 144-152

  Kodali, P ^a   Hawley, M ^a   Walter, K C ^a   Hubbard, K ^a   Yu, N ^a   Tesmer, J R ^a   Levine, T E ^a   Nastasi, M ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

Channeling; Friction; Implantation; Microstructure; Surface hardness; Wear

Indexed keywords

ATOMIC FORCE MICROSCOPY; FRICTION; HARDNESS; ION IMPLANTATION; MATERIALS TESTING; MICROSTRUCTURE; SEMICONDUCTING SILICON; SINGLE CRYSTALS; STRESSES; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; WEAR OF MATERIALS;

CONTACT STRESSES; ION CHANNELING MEASUREMENT; PIN ON DISC APPARATUS; WEAR TEST;

TRIBOLOGY;

FRICTION; ION IMPLANTATION; SILICON; TRIBOLOGY; WEAR;

EID: 0031126431     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(96)07290-0     Document Type: Article

References (9)

1. J.A. Greenwood and J.B.P. Williamson, Proc. R. Soc. Lond., A295 (1966) 300.
2. J. Lekki, Z. Statchura, N. Preikschas, B. Cleff, M. Cholewa and G.J.F. Legge, J. Mater. Res., 9 (1994) 91-95.
3. P.J. Burnett and T.F. Page, J. Mater. Res., 9 (1984) 91.
4. B.K. Gupta and B. Bhushan, Surf. Coat. Technol., 68/69 (1994) 564-570.
5. B.K. Gupta, J. Chevallier and B. Bhushan, Trans. ASME, 115 (1993) 392-399.
6. T. Miyamoto, S. Miyake and R. Kaneko, Wear, 162-164 (1993) 733-738.
7. B. Bhushan and B.K. Gupta, Handbook of Tribology, McGraw-Hill, New York, 1991.
8. B. Bhushan and V. Koinkar, J. Appl. Phys., 75 (1994) 5741-5746.
9. R.D. Arnell, P.B. Davies, J. Halling and T.L. Whomes, Tribology, Springer-Verlag, printed in Hong Kong, 1993.