Finite element analysis of nanostructures with roughness and scratches

Ultramicroscopy

Volumn 97, Issue 1-4, 2003, Pages 495-507

  Bhushan, Bharat ^a   Agrawal, Gaurav B ^a  

^a Ohio State University   (United States)

Author keywords

Atomic force microscope (AFM); Bending stress; Finite element method (FEM); Silicon; SiO2

Indexed keywords

BEAMS AND GIRDERS; BENDING (DEFORMATION); ELASTICITY TESTING; FINITE ELEMENT METHOD; NANOSTRUCTURED MATERIALS; PLASTIC DEFORMATION; SURFACE ROUGHNESS; TENSILE STRESS;

NANOBEAMS; SCRATCH ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

ANALYTIC METHOD; ARTICLE; CHEMICAL STRUCTURE; ELASTICITY; FINITE ELEMENT ANALYSIS; MECHANICAL STRESS; PITCH; PLASTICITY; SURFACE PROPERTY; TENSILE STRENGTH;

EID: 0038203266     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(03)00078-0     Document Type: Article

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