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Volumn 18, Issue 5, 2007, Pages 1404-1412

Development and analysis of a software tool for stitching three-dimensional surface topography data sets

Author keywords

AFM; Range enlargement; Stitching

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER AIDED SOFTWARE ENGINEERING; FUNCTION EVALUATION; OPTIMIZATION; SURFACE TOPOGRAPHY;

EID: 34247146938     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/5/028     Document Type: Article
Times cited : (41)

References (13)
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    • Large field of view, high spatial resolution, surface measurements
    • Wyant J C and Schmit J 1998 Large field of view, high spatial resolution, surface measurements Int. J. Mach. Tools Manuf. 38 691-8
    • (1998) Int. J. Mach. Tools Manuf. , vol.38 , Issue.5-6 , pp. 691-698
    • Wyant, J.C.1    Schmit, J.2
  • 2
    • 34247133463 scopus 로고    scopus 로고
    • A computational method for stitching a series of 3D surface topography data measured by microscope-type surface profiling instruments
    • Yanagi K, Hasegawa M and Hara S 2002 A computational method for stitching a series of 3D surface topography data measured by microscope-type surface profiling instruments Proc. 3rd euspen Int. Conf. (Eindhoven, The Netherlands) vol 2 pp 653-6
    • (2002) Proc. 3rd Euspen Int. Conf. , vol.2 , pp. 653-656
    • Yanagi, K.1    Hasegawa, M.2    Hara, S.3
  • 7
    • 34247123183 scopus 로고    scopus 로고
    • Bariani P 2005 Dimensional metrology for microtechnology PhD Thesis IPL-DTU
    • (2005) PhD Thesis
    • Bariani, P.1
  • 8
    • 34249941413 scopus 로고    scopus 로고
    • Two-dimensional nanometer-scale calibration based on one-dimensional gratings
    • Garnaes J et al 1998 Two-dimensional nanometer-scale calibration based on one-dimensional gratings Appl. Phys. A 66 S831-5
    • (1998) Appl. Phys. , vol.66 , Issue.7
    • Garnaes, J.1    Al, E.2
  • 10
    • 34247122710 scopus 로고    scopus 로고
    • Kofod N 2002 Validation and industrial application of AFM PhD Thesis IPL-DTU and DFM
    • (2002) PhD Thesis
    • Kofod, N.1
  • 11
    • 0032689328 scopus 로고    scopus 로고
    • Surface topography characterization using an atomic force microscope mounted on a coordinate measuring machine
    • De Chiffre L, Hansen H N and Kofod N 1999 Surface topography characterization using an atomic force microscope mounted on a coordinate measuring machine Ann. CIRP 48 463-6
    • (1999) Ann. CIRP , vol.48 , pp. 463-466
    • De Chiffre, L.1    Hansen, H.N.2    Kofod, N.3
  • 12
    • 0013010043 scopus 로고    scopus 로고
    • Calibration and industrial application of instrument for surface mapping based on AFM
    • Hansen H N, Kofod N, De Chiffre L and Wanheim T 2002 Calibration and industrial application of instrument for surface mapping based on AFM Ann. CIRP 51 471-4
    • (2002) Ann. CIRP , vol.51 , pp. 471-474
    • Hansen, H.N.1    Kofod, N.2    De Chiffre, L.3    Wanheim, T.4
  • 13
    • 84919932409 scopus 로고    scopus 로고
    • Surface mapping with an AFM-CMM integrated system and stitching software
    • Marinello F, Bariani P, De Chiffre L and Hansen H N 2005 Surface mapping with an AFM-CMM integrated system and stitching software Proc. 5th euspen Int. Conf. (Montpellier, France) vol 1 pp 229-32
    • (2005) Proc. 5th Euspen Int. Conf. , vol.1 , pp. 229-232
    • Marinello, F.1    Bariani, P.2    De Chiffre, L.3    Hansen, H.N.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.