Nano position sensing based on laser trapping technique for flat surfaces

Measurement Science and Technology

Volumn 19, Issue 8, 2008, Pages

  Michihata, M ^a   Takaya, Y ^a   Hayashi, T ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Dimensional measurement; Flat urface; Laser trapping probe; Nano CMM; Standing wave

Indexed keywords

ELASTIC WAVES; PROBES; UNCERTAINTY ANALYSIS;

DIMENSIONAL MEASUREMENTS; FLAT URFACE; LASER TRAPPING PROBE; NANO-CMM; STANDING WAVE;

COORDINATE MEASURING MACHINES;

EID: 48849115878     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/19/8/084013     Document Type: Article

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