3D metrology with a compact scanning probe microscope based on self-sensing cantilever probes

Measurement Science and Technology

Volumn 18, Issue 2, 2007, Pages 328-333

  Dal Savio, C ^a   Dejima, S ^a   Danzebrink, H U ^a   Gotszalk, T ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

AFM; Atomic force microscopy; Micro systems; Piezoresistive cantilever; Scanning probe microscopy; SFM; Sidewalls

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTATIONAL COMPLEXITY; DEFLECTION (STRUCTURES); PIEZOELECTRIC DEVICES; SCANNING PROBE MICROSCOPY;

MICRO SYSTEMS; PIEZORESISTIVE CANTILEVER; PIEZORESISTIVE SENSORS;

MEASUREMENT THEORY;

ATOMIC FORCE MICROSCOPY; COMPUTATIONAL COMPLEXITY; DEFLECTION (STRUCTURES); MEASUREMENT THEORY; PIEZOELECTRIC DEVICES; SCANNING PROBE MICROSCOPY;

EID: 34247188161     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/2/S02     Document Type: Conference Paper

References (15)

1. Putman C A J, de Grooth B, van Hulst N F and Greve J 1992 A detailed analysis of the optical beam deflection technique for use in atomic force microscopy J. Appl. Phys. 72 6-12
2. Tansock J and Williams C C 1992 Force measurement with a piezoelectric cantilever in a scanning force microscope Ultramicroscopy 42 1464
3. Tortonese M, Yamada H, Barrett R C and Quate C F 1991 Atomic force microscopy using a piezoresistive cantilever Proc. Transducers '91 IEEE 91 CH2817-5 p 448
4. Brugger J, Buser R A and Rooij N F 1992 Micromachined atomic force microprobe with integrated capacitive read-out J. Micromech. Microeng. 2 218
5. Tyrrell J W G, Dal Savio C, Krüger-Sehm R and Danzebrink H-U 2004 Development of a combined interference microscope objective and scanning probe microscope Rev. Sci. Instrum. 75 1120-6
6. Danzebrink H-U, Tyrrell J W G, Dal Savio C and Krüger-Sehm R 2004 Combined interference and scanning force microscope Proc. SPIE 5457 158-65
7. Tortonese M, Barrett R C and Quate C F 1993 Atomic resolution with an atomic force microscope using piezoresistive detection Appl. Phys. Lett. 62 834
8. Linnemann R, Gotszalk T, Rangelow I W, Dumania P and Oesterschulze E 1996 Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers J. Vac. Sci. Technol. B 14 856
9. Jumpertz R, Schelten J, Ohlsson O and Saurenbach F 1998 Bridge configuration of piezoresistive devices for scanning force microscopes Sensors Actuators A 70 88
10. Jumpertz R, v d Hart A, Schelten J, Ohlsson O, Sulzbach T and Saurenbach F 1997 Piezoresistive bridge configuration for atomic force microscopy Proc. 27th European Solid-State Device Research Conf. p 680
11. Jumpertz R, v d Hart A, Ohlsson O, Saurenbach F and Schelten J 1998 Piezoresisitve sensors on AFM cantilevers with atomic resolution Microelectron. Eng. 41-42 441
12. Gotszalk T, Radojewski J, Grabiec P B, Dumania P, Shi F, Hudek P and Rangelow I W 1998 Fabrication of multipurpose piezoresistive Wheatstone bridge cantilevers with conductive microtips for electrostatic and scanning capacitance microscopy J. Vac. Sci. Technol. B 16 3948
13. Gotszalk T, Grabiec P B and Rangelow I W 2003 Calibration and examination of piezoresistive Wheatstone bridge cantilevers for scanning probe microscopy Ultramicroscopy 97 385
14. Shakarji C M 1998 Least-squares fitting algorithms of the NIST algorithm testing system J. Res. Natl Inst. Stand. Technol. 103 633
15. Dai G, Wolff H, Pohlenz F, Danzebrink H-U and Wilkening G 2006 Atomic force probe for sidewall scanning of nano- and microstructures Appl. Phys. Lett. 88 171908