Feature-Oriented Measurement Strategy in Atomic Force Microscopy

CIRP Annals - Manufacturing Technology

Volumn 56, Issue 1, 2007, Pages 557-560

  Savio, E ^a   Marinello, F ^a   Bariani, P ^b   Carmignato, S ^a  

^a UNIVERSITY OF PADOVA   (Italy)

^b Schaefer South East Europe Srl   (Italy)

Author keywords

Atomic force microscopy; Control; Pattern

Indexed keywords

COMPUTER SOFTWARE; CONTROL SYSTEMS; MEASUREMENT THEORY; OPTICAL RESOLVING POWER; OPTIMIZATION;

FEATURE-ORIENTED MEASUREMENT; INSTRUMENT CONTROL; RE-PROGRAMMING; SOFTWARE INTERFACE;

ATOMIC FORCE MICROSCOPY;

EID: 34250197938     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2007.05.133     Document Type: Article

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