Tactile and optical microsensors: Test procedures and standards

Measurement Science and Technology

Volumn 19, Issue 8, 2008, Pages

  Neuschaefer Rube, Ulrich ^a   Neugebauer, Michael ^a   Ehrig, Wiebke ^a   Bartscher, Markus ^a   Hilpert, Uwe ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Dimensional measurement; Microsensors; Reference standards; Test procedures; Traceability

Indexed keywords

COMPUTERIZED TOMOGRAPHY; COORDINATE MEASURING MACHINES; MICROSENSORS;

COORDINATE METROLOGY; DIMENSIONAL MEASUREMENTS; MICRO COMPUTED TOMOGRAPHY (MICRO-CT); OPTICAL MICRO-SENSOR; REFERENCE STANDARD; SENSOR CHARACTERISTICS; TEST PROCEDURES; TRACEABILITY;

STANDARDS;

EID: 48849089090     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/19/8/084010     Document Type: Article

References (8)

1. Weckenmann A, Peggs G and Hoffmann J 2006 Probing systems for dimensional micro- and nano-metrology Meas. Sci. Technol. 17 504-9
2. Schwenke H, Neuschaefer-Rube U, Kunzmann H and Pfeifer T 2002 Optical methods for dimensional metrology in production engineering Ann. CIRP 51 685-99
3. Bartscher M, Hilpert U, Goebbels J and Weidemann G 2007 Enhancement and proof of accuracy of industrial computed tomography (CT) measurements Ann. CIRP 56/1 495-8
4. Ehrig W and Neuschaefer-Rube U 2007 Artefacts with rough surfaces for verification of optical microsensors Proc. SPIE 6616/1 661626
5. http://www.imm-mainz.de
6. Neugebauer M, Hilpert U, Bartscher M and Gerwien N 2007 Ein geometrisches Normal zur Prüfung von Röntgen-Mikro-Computertomografiemesssystemen Tech. Mess. 74 565-71
7. Neugebauer M and Neuschaefer-Rube U 2005 A new micro artefact for testing of optical and tactile sensors Proc. 5th EUSPEN Int. Conf. (Montpellier, France, 8-11 May 2005) vol 1 ed F Chevrier pp 201-4
8. Neugebauer M, Neuschaefer-Rube U and Wäldele F 2005 German Patent DE 103 42 689 B3 Verfahren zur Herstellung von Prüfkörpern für die berpüfung von Messgeräten für Mikro-Bohrungen (Procedure for the manufacturing of artifacts to test measurement devices for micro holes)