Correction of structure width measurements performed with a combined shear-force/tunnelling microscope

Measurement Science and Technology

Volumn 18, Issue 2, 2007, Pages 456-461

  Sikora, Andrzej ^a  

^a ELECTROTECHNICAL INSTITUTE   (Poland)

Author keywords

AFM; Measured size correction; Shear force microscopy; Surface measurement

Indexed keywords

ATOMIC FORCE MICROSCOPY; ERROR CORRECTION; NANOSTRUCTURES; PARAMETER ESTIMATION;

MEASURED SIZE CORRECTION; SHEAR FORCE MICROSCOPY;

SURFACE MEASUREMENT;

ATOMIC FORCE MICROSCOPY; ERROR CORRECTION; NANOSTRUCTURES; PARAMETER ESTIMATION; SURFACE MEASUREMENT;

EID: 34247222161     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/2/S18     Document Type: Conference Paper

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