Drift and spatial distortion elimination in atomic force microscopy images by the digital image correlation technique

Journal of Strain Analysis for Engineering Design

Volumn 43, Issue 8, 2008, Pages 729-743

  Xu, Z H ^a   Li, X D ^a   Sutton, M A ^a   Li, N ^a  

^a University of South Carolina   (United States)

Author keywords

Atomic force microscopy; Digital image correlation; Drift distortion; Spatial distortion

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC PHYSICS; ATOMS; CLOSED LOOP CONTROL SYSTEMS; DIGITAL ARITHMETIC; DIGITAL IMAGE STORAGE; ELECTRONIC EQUIPMENT TESTING; ERRORS; IMAGE ENHANCEMENT; IMAGE RECONSTRUCTION; MECHANICAL TESTING; NANOSTRUCTURED MATERIALS; SCANNING PROBE MICROSCOPY; SECONDARY EMISSION; STRAIN MEASUREMENT;

AFM IMAGES; ATOMIC FORCES; CLOSED-LOOP CONTROLS; DIGITAL IMAGE CORRELATION; DIGITAL IMAGE CORRELATION TECHNIQUES; DRIFT DISTORTION; MEASUREMENT TECHNIQUES; NANO MATERIALS; NANO METROLOGIES; NANOFABRICATION; NANOSCALE; RAPID DEVELOPMENTS; SCANNING ELECTRON MICROSCOPY IMAGES; SPATIAL DISTORTION; SPATIAL DISTORTIONS;

MICROSCOPIC EXAMINATION;

EID: 55349091008     PISSN: 03093247     EISSN: None     Source Type: Journal    
DOI: 10.1243/03093247JSA400     Document Type: Article

References (25)

1. Li, X. D. and Bhushan, B. A review of nanoindentation continuous stiffness measurement technique and its applications. Mater. Characteristics, 2002, 48, 11-36.
2. Li, X. D., Gao, H., Murphy, J., and Caswell, K. K. Nanoindentation of silver nanoswires. Nano Lett., 2003, 3, 1495-1498.
3. Bhushan, B. Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices. Microelectron Engng, 2007, 84, 387-412.
4. Chen, X. D., Xu, Z. H., Li, X., Shaibat, M. A., Ishii, Y., and Ruoff, R. S. Structural and mechanical characterization of platelet graphite nanofibers. Carbon, 2007, 45, 416-423.
5. Dirscheri, K., Garnaes, J., Nielsen, L., Jogensen, J. F., and Sorensen, M. P. Modeling the hysteresis of a scanning probe microscope. J. Vac. Sci. Technol. B, 2000, 18, 621-626.
6. Chasiotis, I. and Knauss, W. G. A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy. Expl Mechanics, 2002, 42, 51-57.
7. Trawick, M. L., Megens, M., Harrison, C., Angelescu, D. E., Vega, D. A., Chaikin, P. M., Register, R. A., and Adamson, D. H. Correction for piezoelectric creep in scanning probe microscopy images using polynomial mapping. Scanning, 2003, 25, 25-33.
8. Knauss, W. G., Chasiotis, I., and Huang, Y. Mechanical measurements at the micron and nanometer scales. Mechanics Mater., 2003, 35, 217-231.
9. Chang, S., Wang, C. S., Xiong, C. Y., and Fang, J. Nanoscale in-plane displacement evaluation by AFM scanning and digital image correlation processing. Nanotechnology, 2005, 16, 344-349.
10. Tin, H. and Bruck, H. A. A new method for characterizing nonlinearity in scanning probe microscopes using digital image correlation. Nanotechnology, 2005, 16, 1849-1855.
11. Sun, Y. and Pang, J. H. L. AFM image reconstruction for deformation measurements by digital image correlation. Nanotechnology, 2006, 17, 933-939.
12. Sutton, M. A., Li, N., Garcia, D., Cornille, N., Orteu, J. T., McNeill, S. R., Schreier, H. W., and Li, X. D. Metrology in a scanning electron microscope: theoretical developments and experimental validation. Measmt Sci. Technol., 2006, 17, 2613-2622.
13. Lapshin, R. V. Automatic drift elimination in probe microscope images based on techniques of counter-scanning and topography feature recognition. Measmt Sci. Technol., 2007, 18, 907-927.
14. Sutton, M. A., Li, N., Joy, D. C., Reynolds, A. P., and Li, X. D. Scanning electron microscopy for quantitative small and large deformation measurements Part I: SEM imaging at magnifications from 200 to 10,000. Expl Mechanics, 2007, 47, 775-787.
15. Sutton, M. A., Li, N., Garcia, D., Cornille, N., Orteu, J. J., McNeill, S. R., Schreier, H. W., Li, X. D., and Reynolds, A. P. Scanning electron microscopy for quantitative small and large deformation measurements Part II: experimental validation for magnifications from 200 to 10,000. Expl Mechanics, 2007, 47, 789-804.
16. Peters, W. H. and Ranson, W. R. Digital imaging techniques in experimental stress analysis. Opt. Engng, 1982, 21, 427-432.
17. McNeill, S. R., Sutton, M. A., Wolters, W. J., and Peters, W. H. Determination of displacements using an improving digital correlation method. Image Vision Computing, 1983, 1, 1333-1339.
18. Sutton, M. A., Cheng, M., Peters, W. H., Chao, Y. J., and McNeill, S. R. Application of an optimized digital correlation method to planar deformation analysis. Image Vision Computing, 1986, 4, 143-153.
19. Bruck, H. A., McNeill, S. R., Sutton, M. A., and Peters, W. H. Digital image correlation using Newton-Raphson method of partial differential correction. Expl Mechanics, 1989, 29, 262-267.
20. Vendroux, G. and Knauss, W. G. Submicron deformation field measurements: part 2. Improved digital image correlation. Expl Mechanics, 1998, 38, 86-91.
21. Henriksen, K. and Stipp, S. L. S. Image distortion in scanning probe microscopy. Am. Mineralogist, 2002, 87, 5-16.
22. Mantooth, B. A., Donhauser, Z. J., Kelly, K. F., and Weiss, P. S. Cross-correlation image tracking for drift correction and adsorbate analysis. Rev. Scient Instrum., 2002, 73, 313-317.
23. Garnaes, J., Nielsen, L., Dirscherl, K., Jorgensen, J. F., Kasmussen, J. B., Lindelof, P. E., and Sorensen, C. B. Two-dimensional nanometer-scale calibration based on one-dimensional gratings. Appl. Phys. A, 1998, 66, S831-S835.
24. Schreier, H. W., Garcia, D., and Sutton, M. A. Advances in light microscope stereo vision. Expl Mechanics, 2004, 44, 278-288.
25. Nanoscope command reference manual, version 5.12, revision B, Part 004-122-000, 2001 (Digital Instruments, Veeco Metrology Group, Santa Barbara, California).