Tuning the quality factor of bulk micromachined structures using squeezed-film damping

Microsystem Technologies

Volumn 11, Issue 2-3, 2005, Pages 104-110

  Cheng, C C ^a   Fang, W ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; PRESSURE EFFECTS; SILICON; TUNING; VIBRATIONS (MECHANICAL);

AIR DAMPING; AMBIENT PRESSURE; DYNAMIC SYSTEMS; MICROMACHINED STRUCTURE;

MICROMACHINING;

EID: 24044439206     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0457-5     Document Type: Article

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