Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 839-848

  Pandey, Ashok Kumar ^a   Pratap, Rudra ^a   Chau, Fook Siong ^b  

^a INDIAN INSTITUTE OF SCIENCE   (India)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Analytical results; Perforations; Reynolds equation; Squeeze film damping

Indexed keywords

COMPRESSIBILITY; COMPUTATIONAL METHODS; CONFORMAL MAPPING; DAMPING; GREEN'S FUNCTION; REYNOLDS EQUATION;

ANALYTICAL SOLUTION; DIFFUSION EQUATION; MAPPING FUNCTION; SQUEEZE FILM DAMPING;

MEMS;

EID: 34047168143     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.09.006     Document Type: Article

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