Waveform design for pulse-and-hold electrostatic actuation in MEMS

Sensors and Actuators, A: Physical

Volumn 134, Issue 1, 2007, Pages 213-220

  Sumali, Hartono ^a   Massad, Jordan E ^a   Czaplewski, David A ^a   Dyck, Christopher W ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Electrostatic actuation; Input shaping; RF MEMS; Switch bounce

Indexed keywords

CANTILEVER BEAMS; ELECTROSTATICS; FINITE ELEMENT METHOD; RELIABILITY THEORY; SWITCHES; WAVEFORM ANALYSIS;

ELECTROSTATIC ACTUATION; INPUT SHAPING; SWITCH BOUNCE;

MICROELECTROMECHANICAL DEVICES;

EID: 33847273627     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.04.041     Document Type: Article

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