Metal patterning process on rigid and flexible substrates using nanoimprint lithography and resist pattern transfer technique

Journal of Nanoscience and Nanotechnology

Volumn 9, Issue 7, 2009, Pages 4338-4341

  Jung, Ho Yong ^a   Han, Kang Soo ^a   Lee, Jong Hwa ^a   Lee, Heon ^a  

^a Korea University   (South Korea)

Author keywords

Lift off process; Rabbit ear shaped defect; Resist pattern transfer; UV curable adhesive; UV nanoimprint lithography (UV NIL)

Indexed keywords

LIFT-OFF PROCESS; RABBIT EAR SHAPED DEFECT; RESIST PATTERN TRANSFER; UV CURABLE ADHESIVE; UV NANOIMPRINT LITHOGRAPHY (UV-NIL);

ACETONE; ASPECT RATIO; DEFECTS; METALS; PHOTORESISTS; POLYETHYLENE TEREPHTHALATES; REACTIVE ION ETCHING; SILICON; SUBSTRATES; THERMOPLASTICS;

NANOIMPRINT LITHOGRAPHY;

EID: 70350309806     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2009.M56     Document Type: Conference Paper

References (18)

1. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67,3114 (1995).
2. S. Y. Chou, P. R. Krauss, W. Zhang, L. Guo, and L. Zhuang, J. Vac. Sci. Technol. B 15, 2897 (1997).
3. H. Lee, S. Hong, K. Yang, and K. Choi, Appl. Phys. Lett. 88, 143112 (2006).
4. H. Lee, S. Hong, K. Yang, and K. Choi, Micwelectron. Eng. 83, 323 (2006).
5. W.-C. Liao, S. L.-C. Hsu, S.-Y. Chu, and P.-C. Kau, Micwelectron. Eng. 77, 250 (2005).
6. K.-S. Han, S.-H. Hong, and H. Lee, Appl. Phys. Lett. 91, 123118 (2007).
7. H. Lee, J. Y. Huh, K.-Y. Yang, S. Hong, and G.-Y. Jung, Solid State Phenomena 121-123, 665 (2007).
8. H. Lee, J. Vac. Sci. Technol. B 23, 1102 (2005).
9. G. Y. Jung, W. Wu, S. Ganapathiappan, D. A. A. Ohlberg, M. SaifIslam, X. Li, D. L. Olynick, H. Lee, Y. Chen, S. Y. Wang, W. M.Tong, and R. S. Williams, Appl. Phys. A 81, 1331 (2005).
10. B. Faircloth, H. Rohrs, R. Tiberio, R. Ruoff, and R. R. Krchnavek, J. Vac. Sci. Technol. B 18, 1866 (2000).
11. Y. Chen, D. S. Macintyre, and S. Thoms, Micwelectron. Eng. 67-68, 245 (2003).
12. P. Carlberg, M. Graczyk, E.-L. Sarwe, I. Maximov, M. Beck, and L. Montelius, Micwelectwn. Eng. 67-68, 203 (2003).
13. G.-Y. Jung, Z. Li, W. Wu, Y. Chen, D. L. Olynick, S.-Y. Wang, W. M. Tong, and R. S. Williams, Langmuir 21, 1158 (2005).
14. H. Lee and G.-Y. Jung, Micwelectwn. Eng. 77, 168 (2005).
15. H. Lee, K.-Y. Yang, S. Hong, C. D. Schaper, and G.-Y. Jung, Solid Slate Phenomena 121-123, 661 (2007).
16. K. M. Abd El-Kader and A. S. Orabi, Polym. Test. 21, 591 (2002).
17. H. Lee and G.-Y. Jung, Jpn. J. Appl. Phys. 43, 8369 (2004).
18. H. Lee and G.-Y. Jung, Micwelectwn. Eng. 77, 42 (2005).