Fabrication of 100 nm metal lines on flexible plastic substrate using ultraviolet curing nanoimprint lithography

Applied Physics Letters

Volumn 88, Issue 14, 2006, Pages

  Lee, Heon ^a   Hong, Sunghoon ^a   Yang, Kiyeon ^a   Choi, Kyungwoo ^b  

^a Korea University   (South Korea)

^b Korea Institute of Nuclear Safety (KINS)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; DEGRADATION; NANOTECHNOLOGY; PHOTOLITHOGRAPHY; TRANSPARENCY; ULTRAVIOLET RADIATION;

FABRICATE PATTERNS; METAL LINES; METAL PATTERNS; NANOIMPRINTS;

METALLIZING;

EID: 33645672608     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2193653     Document Type: Article

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