SCOPUS 정보 검색 플랫폼

Volumn 83, Issue 2, 2006, Pages 323-327

Fabrication of nano-sized resist patterns on flexible plastic film using thermal curing nano-imprint lithography

(4) Lee, Heon a Hong, Sunghoon a Yang, Kiyeon a Choi, Kyungwoo b

b Korea Institute of Nuclear Safety (KINS) (South Korea)

Author keywords

Benzyl methacrylate monomer; Flexible substrate; Hot embossing nano imprinting lithography; Monomer based imprinting lithography; PET (polyethylene terephthalate) film; Polymerization; Thermal initiator; Transparent polymer film

Indexed keywords

BIOMEDICAL ENGINEERING; FLEXIBLE COUPLINGS; LITHOGRAPHY; MONOMERS; PHOTOLITHOGRAPHY; PLASTIC FILMS; POLYMERIZATION; POLYMERS; TRANSPARENCY;

BENZYL-METHACRYLATE MONOMER; FLEXIBLE SUBSTRATES; HOT EMBOSSING NANO-IMPRINTING LITHOGRAPHY; MONOMER BASED IMPRINTING LITHOGRAPHY; PET (POLYETHYLENE- TEREPHTHALATE) FILMS; THERMAL INITIATOR;

NANOSTRUCTURED MATERIALS;

EID: 32044434652 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2005.09.006 Document Type: Article

Times cited : (65)

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