Controlled thinning and surface smoothening of silicon nanopillars

Nanotechnology

Volumn 20, Issue 44, 2009, Pages

  Kalem, S ^a   Werner, P ^b   Nilsson, B ^c   Talalaev, V G ^b   Hagberg, M ^c   Arthursson, O ^c   Sodervall U ^c  

^a SCIENTIFIC AND TECHNOLOGICAL RESEARCH COUNCIL OF TURKEY   (Turkey)

^b MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^c CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CORE SHELL STRUCTURE; EXCITED CARRIERS; FUNCTIONAL COMPONENTS; INFRARED EMISSIONS; LONG DURATION; NANOPILLARS; NANOSCALE ELECTRONIC DEVICES; OXIDE SHELL; PILLAR STRUCTURE; SILICON CORES; SILICON FLUORIDES; STRAIN EFFECT; SURFACE MANIPULATION; SURFACE SMOOTHENING; TEM; THICK OXIDES; VIBRATIONAL MODES;

AMMONIUM COMPOUNDS; ELECTRON BEAMS; PLANTS (BOTANY); SEMICONDUCTOR QUANTUM WELLS; SHELLS (STRUCTURES); TRANSMISSION ELECTRON MICROSCOPY;

SILICON;

SILICON;

ARTICLE; CHEMICAL STRUCTURE; ELECTRON BEAM; PHOTOLUMINESCENCE; PRIORITY JOURNAL; SYNTHESIS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 70349675855     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/44/445303     Document Type: Article

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