Synthesis of ammonium silicon fluoride cryptocrystals on silicon by dry etching

Applied Surface Science

Volumn 236, Issue 1-4, 2004, Pages 336-341

  Kalem, Seref ^a  

^a SCIENTIFIC AND TECHNOLOGICAL RESEARCH COUNCIL OF TURKEY   (Turkey)

Author keywords

Ammonium silicon fluoride; Cryptocrystal; Cryptohalite; Dry etching; Fluorosilicate; Low k dielectrics; Porous silicon; Silicon; Surface treatment; Vibrational spectroscopy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DRY ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAIN SIZE AND SHAPE; HYDROFLUORIC ACID; LITHOGRAPHY; MOLECULAR BEAM EPITAXY; NITRIC ACID; POROUS SILICON; SILICON COMPOUNDS; THERMAL EFFECTS; X RAY DIFFRACTION;

AMMONIUM SILICON FLUORIDE; CRYPTOCRYSTALS; METALLIZATION APPLICATIONS; POROUS SILICON LAYERS; SOLID COMPOUND LAYERS;

AMMONIUM COMPOUNDS;

EID: 4043079773     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.05.008     Document Type: Article

References (12)

1. Kingon A.I., Maria J.-P., Streiffer S.K. Nature. 406:2000;1032.
2. Angello P.D. IBM J. Res. Dev. 46:2002;1.
3. Kalem S. J. Appl. Phys. 66:1989;3097.
4. Fang S.F., Adomi K., Iyer S., Markoc H., Zabel H., Choi C., Otsuka N. J. Appl. Phys. 68:1990;31.
5. Ogawa H., Arai T., Yanagisawa M., Ichiki T., Horiike Y. Jpn. J. Appl. Phys. 41:2002;5349.
6. Kalem S., Yavuz O. Opt. Express. 6:2000;7.
7. Lehman V., Gosele U. Appl. Phys. Lett. 58:1991;856.
8. Canham L.T. Appl. Phys. Lett. 57:1990;1046.
9. Kalem S., Rosenbauer M. Applied Phys. Lett. 67:1995;2551.
10. Fathauer R.W., George T., Ksendzov A., Vasquez R.P. Appl. Phys. Lett. 60:1991;995.
11. W.L. Roberts, G.R. Rapp, T.J. Cambell, Enc. of Minerals, 2nd ed., Kluwer Academic Publishers, Dordrecht, 1990.
12. C.J. Pouchert (Ed.), The Aldrich Library of FTIR Spectra, 1st ed., Aldrich Chemicals Company Inc., USA, 1985, p. 1294.