Large fluorine-vacancy clusters in Si and their capture efficiency for self-interstitials

Applied Physics Letters

Volumn 89, Issue 9, 2006, Pages

  Lopez, Giorgia M ^a,b   Fiorentini, Vincenzo ^a,b,c  

^a CNR   (Italy)

^b UNIVERSITY OF CAGLIARI   (Italy)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEXATION; FLUORINE; ION IMPLANTATION; PROBABILITY DENSITY FUNCTION; SILICON;

CAPTURE EFFICIENCY; FLUORINE-VACANCY CLUSTERS; SELF-INTERSTITIALS;

HIGH ENERGY PHYSICS;

EID: 33748256295     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2338555     Document Type: Article

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