The ion energy distributions in a high power impulse magnetron plasma

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2005, Pages 470-473

  Bohlmark, J ^a   Ehiasarian, A P ^b   Lattemann, M ^b   Alami, J ^a   Helmersson, U ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

Author keywords

Ion assisted deposition; Plasma source; Power supplies; Sputter deposition

Indexed keywords

GLOW DISCHARGES; IONS; MAGNETRON SPUTTERING; MASS SPECTROMETERS; SPUTTER DEPOSITION;

ION ASSISTED DEPOSITION; POWER SUPPLIES;

PLASMA SOURCES;

EID: 33645010701     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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