메뉴 건너뛰기




Volumn 80, Issue 8, 2009, Pages

Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL SIGNAL; FREE END; IN-PLANE; LINE-SCAN CAMERAS; MICRO-CANTILEVERS; MICROCANTILEVER ARRAYS; MULTI-MODE WAVEGUIDES; RIB WAVEGUIDES; SILICON-ON-INSULATOR SUBSTRATES; SMALL GAPS; TRANSDUCTION METHOD; WAVEGUIDE SPLITTERS; Y-BRANCH;

EID: 69749096882     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3186735     Document Type: Article
Times cited : (18)

References (35)
  • 2
    • 0042156377 scopus 로고    scopus 로고
    • Micromechanics senses biomolecules
    • DOI 10.1016/S1369-7021(02)05139-8
    • R. Raiteri, M. Grattarola, and R. Berger, Mater. Today 1369-7021 5, 22 (2002). 10.1016/S1369-7021(02)05139-8 (Pubitemid 40421419)
    • (2002) Materials Today , vol.5 , Issue.1 , pp. 22-29
    • Raiteri, R.1    Grattarola, M.2    Berger, R.3
  • 7
    • 0033963669 scopus 로고    scopus 로고
    • Microcantilever-based biosensors
    • DOI 10.1016/S0304-3991(99)00145-X, PII S030439919900145X
    • A. M. Moulin, S. J. O'Shea, and M. E. Welland, Ultramicroscopy 0304-3991 82, 23 (2000). 10.1016/S0304-3991(99)00145-X (Pubitemid 30070080)
    • (2000) Ultramicroscopy , vol.82 , Issue.1-4 , pp. 23-31
    • Moulin, A.M.1    O'Shea, S.J.2    Welland, M.E.3
  • 8
    • 26644435999 scopus 로고    scopus 로고
    • Microcantilever biosensors
    • DOI 10.1016/j.ymeth.2005.05.011, PII S1046202305001076, Biosensors
    • K. M. Hansen and T. Thundat, Methods 1046-2023 37, 57 (2005). 10.1016/j.ymeth.2005.05.011 (Pubitemid 41443375)
    • (2005) Methods , vol.37 , Issue.1 , pp. 57-64
    • Hansen, K.M.1    Thundat, T.2
  • 14
    • 0033977788 scopus 로고    scopus 로고
    • Environmental sensors based on micromachined cantilevers with integrated read-out
    • DOI 10.1016/S0304-3991(99)00148-5, PII S0304399199001485
    • A. Boisen, J. Thaysen, H. Jensenius, and O. Hansen, Ultramicroscopy 0304-3991 82, 11 (2000). 10.1016/S0304-3991(99)00148-5 (Pubitemid 30070078)
    • (2000) Ultramicroscopy , vol.82 , Issue.1-4 , pp. 11-16
    • Boisen, A.1    Thaysen, J.2    Jensenius, H.3    Hansen, O.4
  • 15
    • 0037865576 scopus 로고    scopus 로고
    • Optimised cantilever biosensor with piezoresistive read-out
    • DOI 10.1016/S0304-3991(03)00063-9
    • P. A. Rasmussen, J. Thaysen, O. Hansen, S. C. Eriksen, and A. Boisen, Ultramicroscopy 0304-3991 97, 371 (2003). 10.1016/S0304-3991(03)00063-9 (Pubitemid 36683310)
    • (2003) Ultramicroscopy , vol.97 , Issue.1-4 , pp. 371-376
    • Rasmussen, P.A.1    Thaysen, J.2    Hansen, O.3    Eriksen, S.C.4    Boisen, A.5
  • 20
    • 0027191611 scopus 로고
    • 0277-786X. 10.1117/12.141208
    • S. Wu and H. J. Frankena, Proc. SPIE 0277-786X 1793, 83 (1993). 10.1117/12.141208
    • (1993) Proc. SPIE , vol.1793 , pp. 83
    • Wu, S.1    Frankena, H.J.2
  • 26
    • 69749110523 scopus 로고    scopus 로고
    • International Workshoon Nanomechanical Sensors, Montreal, Canada, 28-30 May (unpublished).
    • G. P. Nordin, J. W. Noh, Y. Qian, J. Song, R. Anderson, and S. Kim, International Workshop on Nanomechanical Sensors, Montreal, Canada, 28-30 May 2007 (unpublished).
    • (2007)
    • Nordin, G.P.1    Noh, J.W.2    Qian, Y.3    Song, J.4    Anderson, R.5    Kim, S.6
  • 31
    • 19944410166 scopus 로고    scopus 로고
    • Design and analysis of an integrated optical sensor for scanning force microscopies
    • DOI 10.1109/JSEN.2005.846172
    • C. Kocabas and A. Aydinli, IEEE Sens. J. 1530-437X 5, 411 (2005). 10.1109/JSEN.2005.846172 (Pubitemid 40751332)
    • (2005) IEEE Sensors Journal , vol.5 , Issue.3 , pp. 411-418
    • Kocabas, C.1    Aydinli, A.2
  • 35
    • 33847712977 scopus 로고    scopus 로고
    • Design of high-sensitivity cantilever and its monolithic integration with CMOS circuits
    • DOI 10.1109/JSEN.2007.891938
    • X. Yu, Y. Tang, H. Zhang, T. Li, and W. Wang, IEEE Sens. J. 1530-437X 7, 489 (2007). 10.1109/JSEN.2007.891938 (Pubitemid 46384582)
    • (2007) IEEE Sensors Journal , vol.7 , Issue.4 , pp. 489-495
    • Yu, X.1    Tang, Y.2    Zhang, H.3    Li, T.4    Wang, W.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.