Compact 90° trench-based splitter for silicon-on-insulator rib waveguides

Optics Express

Volumn 15, Issue 25, 2007, Pages 16712-16718

  Qian, Yusheng ^a   Song, Jiguo ^a   Kim, Seunghyun ^a   Nordin, Gregory P ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; FINITE DIFFERENCE TIME DOMAIN METHOD; MEASUREMENT THEORY; SILICON ON INSULATOR TECHNOLOGY;

SILICON-ON-INSULATOR (SOI) RIB WAVEGUIDES; SPLITTER OPTICAL PERFORMANCE; TRENCH FILL MATERIAL;

WAVEGUIDES;

EID: 37149040693     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.016712     Document Type: Article

References (17)

1. B. Jalali, S. Yegnanarayanan, T. Yoon, T. Yoshimoto, I. Rendina, and F. Coppinger, "Advances in Silicon-on-insulator Optoelectronics," IEEE J. Sel. Top. Quantum Electron. 4, 938-947 (1998).
2. Y. A. Vlasov and S. J. McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Express 12, 1622-1631 (2004).
3. W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. V. Campenhout, P. Bienstman, and D. V. Thourhout, "Nanophotonic Waveguides in Silicon-on-insulator Fabricated With CMOS Technology," J. Lightwave Technol. 23, 401- (2005).
4. J. Liu, J. Yu, S. Chen, and Z. Li, "Integrated folding 4×4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching," Photon. Technol. Lett. 17, 1187-1189 (2005).
5. I. Kiyat, A. Aydinli, N. Dagli, "Low-power thermooptic tuning of SOI resonator switch," Photon. Technol. Lett. 18, 364-366 (2006).
6. G. P. Nordin, J. W. Noh, and S. Kim, "In-plane photonic transduction for microcantilever sensor arrays," in Nanoscale Imaging, Spectroscopy, Sensing, and Actuation for Biomedical. Applications IV, Alexander N. Cartwright, Dav V. Nicolau, and Paul L. Gourley, Editors, Proceedings of SPIE Vol. 6447, pp. 64470J-1 to - 8 (2007).
7. Y. Z. Tang, W. H. Wang, T. Li, and Y. L. Wang, "Integrated waveguide turning mirror on silicon-on-insulator," Photon. Technol. Lett. 14, 68-70 (2002).
8. S. Lardenois, D. Paskcal, L. Vivien, E. Cassan, and S. Laval, "Low-loss submicrometer silicon-on-insulator rib waveguides and corner mirrors," Opt. Lett. 28, 1150-1152 (2003).
9. Y. Qian, S. Kim, J. Song, and G. P. Nordin, "Compact and low loss silicon-on-insulator rib waveguide 90° bend," Opt. Express 14, 6020-6028 (2006)
10. C. S. Hsiao and L. Wang, "Design for beam splitting components employing silicon-on-insulator rib waveguide structures," Opt. Lett. 30, 3153-3155 (2005).
11. A. Koster, E. Cassan, S. Laval, L. Vivien, and D. Pascal, "Ultracompact splitter for submicrometer silicon-on-insulator rib waveguides," J. Opt. Soc. Am. A 21, 2180-2185 (2004).
12. L. Li, G. P. Nordin, J. M. English, and J. Jiang, "Small-area bends and beamsplitters for low-index-contrast waveguides", Opt. Express 11(3), 282-290 (2003).
13. D. Goldring, E. Alperovich, U. Levy, and D. Mendlovic, "Analysis of waveguide-splitter-junction in high-index silicon-on-insulator waveguides," Opt. Express 13, 2931-2940 (2005).
14. S. Kim, J. Jiang, and G. P. Nordin, "Design of compact polymer Mach-Zender interferometer and ring resonator with air trench structures," Opt. Eng. 45, 054602 (2006).
15. A. Taflove, Computational Electrodynamics: The Finite-Difference Time-Domain Method, (Artech House, Boston, Mass., 1995).
16. J. Cai, G. P. Nordin, S. Kim, and J. Jiang, "Three-dimensional, analysis of a hybrid photonic crystal-conventional waveguide 90° bend," Appl. Opt. 43, 4244-4249 (2004).
17. J. P. Berenger, "A perfectly matched layer for the absorption of electromagnetic waves," J. Comput. Phys. 114, 185-200 (1994).