In-plane photonic transduction of silicon-on-insulator microcantilevers

Optics Express

Volumn 16, Issue 16, 2008, Pages 12114-12123

  Noh, Jong Wook ^a   Anderson, Ryan ^a   Kim, Seunghyun ^a   Cardenas, Jaime ^b   Nordin, Gregory P ^a  

^a Department of Electrical and Computer Engineering   (United States)

^b Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BACTERIOPHAGES; COMPOSITE MICROMECHANICS; SILICON ON INSULATOR TECHNOLOGY; WAVEGUIDES;

DIFFERENTIAL SIGNAL; MICROCANTILEVER DEFLECTION; MINIMUM DETECTABLE DEFLECTIONS; MONOTONICALLY DEPENDENT; MULTI-MODE WAVEGUIDES; SENSOR APPLICATIONS; SINGLE-MODE RIB WAVEGUIDES; TRANSDUCTION METHOD;

CHEMICAL SENSORS;

ARTICLE; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MECHANICAL STRESS; METHODOLOGY; OPTICS; PHOTOMETRY; PHOTON; REFRACTOMETRY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TRANSDUCER;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MINIATURIZATION; OPTICS; PHOTOMETRY; PHOTONS; REFRACTOMETRY; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; STRESS, MECHANICAL; TRANSDUCERS;

EID: 49149097382     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.012114     Document Type: Article

References (32)

1. T. Thundat, E. A.Watcher, S. L. Sharp, and R. J. Warmack, "Detection of mercury vapor using resonating cantilevers," Appl. Phys. Lett. 66, 1695-1697 (1995).
2. R. Raiteri, M. Grattarola, and R. Berger, "Micromechanics senses biomolecules," Materialstoday 5, 22-29 (2002).
3. J. Fritz, M. K. Baller, H. P. Lang, H. Rothuizen, P. Vettiger, E. Meyer, H.-J.Güntherodt, Ch. Gerber, and J. K. Gimzewski, "Translating biomolecular recognition into nanoniechanics," Science 288, 316-318 (2000).
4. G. Wu, R. H. Datar, K. M. Hansen, T. Thundat, R. J. Cote, and A. Majumdar, "Bioassay of prostate-specific antigen, using microcantilevers," Nat. Biotechnol. 19, 856-860 (2001).
5. R. Bashir, J. Z. Hilt, O. Elibol, A. Gupta, and N. A. Peppas, "Microcantilever as an ultrasensitive pH microsensor," Appl. Phys. Lett. 81, 3091-3093 (2002).
6. A. M. Moulin, S. J. O'Shea, and M. E. Weiland, "Microcantilever- based biosensors," Ultramicroscopy 82, 23-31 (2000).
7. T. Thundat and K. M. Hansen, "Microcantilever biosensors," Methods 37, 57-64 (2005).
8. L. G. Carrascosa, M. Moreno, M. Alvarez, and L. M. Lechuga, "Nanomechanical biosensors: a new sensing tool," TrAC 25, 196-206 (2006).
9. J. Zhang, H. P. Lang, F. Huber, A. Bietsch, W. Grange, U. Certa, R. McKendry, H.-J.Güntherodt, M. Hegner, and Ch. Gerber, "Rapid and label-free nanomechanical detection of biomarker transcripts in human RNA," Nature Nanotech. 1, 214-220 (2006).
10. H. P. Lang, R. Berger, F. Battiston, J.-P. Ramseyer, E. Meyer, C. Andreoli, J. Brugger, P. Vettiger, M. Despont, T. Mezzacasa, L. Scandella, H.-J. Güntherodt, Ch. Gerber, and J. K. Gimzewski, "A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors," Appl. Phys. A 66, S61-S64 (1998).
11. J. D. Adams, G. Parrott, C. Bauer, T. Sant, L. Manning, M. Jones, B. Rogers, D. McCorkle, and T. L. Ferrell, "Nanowatt chemical vapor detection with a self-sensing, piezoelectric microcantilever array," Appl. Phys. Lett. 83, 3428-3430 (2003).
12. L. Fadel, F. Lochon, I. Dufour, and O. Français, "Chemical sensing: millimeter size resonant microcantilever performance," J. Micromech. Microeng. 14, S23-S30 (2004).
13. A. Boisen, J. Thaysen, H. Jensenius, and O. Hansen, "Environmental sensors based on micromachined cantilevers with integrated read-out," Ultramicroscopy 82, 11-16 (2000).
14. P. S. Waggoner and H. G. Craighead, "Micro- and nanomechanical sensors for environmental, chemical, and biological detection," Lab Chip 7, 1238-1255 (2007).
15. P. A. Rasmussen, J. Thaysen, O. Hansen, S. C. Eriksen, and A. Boisen, "Optimised cantilever biosensor with piezoresistive read-out," Ultramiscroscopy 97, 371-376 (2003).
16. J. D. Adams, B. Rogers, L. Manning, Z. Hu, T. Thundat, H. Cavazos, and S. C. Minne, "Piezoelectric self-sensing of adsorption-induced microcantilever bending," Sens. Actuators A 126, 182-186 (2006).
17. C. L. Britton, R. L. Jones, P. I. Oden, Z. Hu, R. J. Warmack, S. F. Smith, W. L. Bryan, and J. M. Rochelle, "Multiple-input microcantilever sensors," Ultramicroscopy 82, 17-21 (2000).
18. J. Amirola, A. Rodríguez, L. Castaňer, J. P. Santos, J. Gutiérrez, and M. C. Horrillo, "Micromachined silicon microcantilevers for gas sensing applications with capacitive read-out," Sens. Actuators B 111-112, 247-153 (2005).
19. G. P. Nordin, "In-Plane Photonic Transduction as an Enabler for Microcantilever Arrays," ASME Workshop-Nanomechanics: Sensors and Actuators, Knoxville (2005).
20. G. P. Nordin, J. W. Noh, Y. Qian, J. Song, R. Anderson, and S. Kim, "Demonstration of in-plane photonic transduction for microcantilever arrays," International. Workshop on Nanomechanical. Sensors, Montreal, Canada, May 28-30, 2007.
21. G. P. Nordin, J. W. Noh, and S. Kim, "In-plane photonic transduction for microcantilever sensor arrays," Proc. SPIE 6447, 64470J (2007).
22. Y. Qian, J. Song, S. Kim, and G. P. Nordin, "Compact waveguide splitter and bend networks," Opt. Express 16, 4981-4990 (2008).
23. K. E. Burcham, G. N. D. Brabander, and J. T. Boyd, "Micromachined silicon cantilever beam accelerometer incorporating an integrated optical waveguide," Proc. SPIE 1793, 12-18 (1992).
24. S. Wu, H.J. Frankena, "Integrated optical sensors using micromechanical bridges and cantilevers," Proc. SPIE 1793, 83-89 (1992).
25. M. Nordstrom, D. A. Zauner, M. Calleja, J. Hubner, and A. Boisen, "Integrated optical, readout for miniaturization of cantilever-based sensor system," Appl. Phys. Lett. 91, 1035.12 (2007).
26. R. A. Soref, J. Schmidtchen, and K. Peterman, "Large single-mode rib waveguides in GeSi-Si and Si-onSiO2," IEEEJ. Quantum Electr. 27, 1971-1974 (1991).
27. J. Thaysen, A. D. Yalçinkaya, P. Vettiger, and A. Menon, "Polymer-based stress sensor with integrated readout," J. Phys. D: Appl. Phys. 35, 2698-2703 (2002).
28. A. Kooser, R. L. Gunter, W. D. Delinger, T. L. Porter, and M. P. Eastman, "Gas sensing embedded piezoresistive microcantilever sensors," Sens. Actuators B 99, 474-479 (2004).
29. X. Yu, J. Thaysen, O. Hansen, and A. Boisen, "Optimization of sensitivity and noise in piezoresistive cantilevers," J. Appl. Phys. 92, 6296-6301 (2002).
30. X. Yu, Y. Tang, H. Zhang, T. Li, and W. Wang, "Design of high-sensitivity cantilever and its monolithic integration with CMOS circuit," IEEE Sens. J. 7, 489-495 (2007).
31. C. Kocabas, and A. Aydinli, "Design and analysis of an integrated optical sensor for scanning force microscopies," IEEE Sens. J. 5, 411-418 (2005).
32. K. Zinoviev, C. Dominguez, J. A. Plaza, V. J. C. Busto, and L. M. Lechuga, "A novel optical waveguide microcantilever sensor for the detection of nanomechanical forces," J. Lightwave Technol. 24, 2132-2138 (2006).