Design and analysis of an integrated optical sensor for scanning force microscopies

IEEE Sensors Journal

Volumn 5, Issue 3, 2005, Pages 411-418

  Kocabas, Coskun ^a   Aydinli, Atilla ^a  

^a BILKENT UNIVERSITY   (Turkey)

Author keywords

Atomic force microscopy (AFM); Cantilevers; Optical displacement sensors; Stress optic effect

Indexed keywords

ATOMIC FORCE MICROSCOPY; FIBER BRAGG GRATINGS; FINITE ELEMENT METHOD; LIGHT MODULATION; MATRIX ALGEBRA; OPTICAL WAVEGUIDES; PHOTOELASTICITY; SEMICONDUCTING GALLIUM ARSENIDE; STRAIN;

INTENSITY MODULATION; OPTICAL DISPLACEMENT SENSORS; OPTICAL POWER; STRESS-OPTIC EFFECT;

OPTICAL SENSORS;

EID: 19944410166     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2005.846172     Document Type: Article

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