Micromechanical cantilever as an ultrasensitive pH microsensor

Applied Physics Letters

Volumn 81, Issue 16, 2002, Pages 3091-3093

  Bashir, R ^a   Hilt, J Z ^b   Elibol, O ^a   Gupta, A ^a   Peppas, N A ^a  

^a PURDUE UNIVERSITY   (United States)

^b PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPOLYMERIC HYDROGELS; CROSSLINKED; DYNAMIC RANGE; MAXIMUM DEFLECTION; MECHANICAL AMPLIFICATION; MICRO-CANTILEVERS; MICROMECHANICAL CANTILEVERS; PH CHANGE; POLY(ETHYLENE GLYCOL) DIMETHACRYLATE; POLY(METHACRYLIC ACID); POLYMER NETWORKS; POLYMER SWELLING; REVERSIBLE CHANGE; SILICON ON INSULATOR WAFERS; SURFACE STRESS; ULTRAHIGH SENSITIVITY; ULTRASENSITIVE; UV POLYMERIZATION;

COMPOSITE MICROMECHANICS; ETHYLENE; FREE RADICAL POLYMERIZATION; GLYCOLS; NANOCANTILEVERS; POLYETHYLENE GLYCOLS; POLYMERS; SEMICONDUCTING SILICON COMPOUNDS;

SILICON WAFERS;

EID: 79955997040     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1514825     Document Type: Article

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