Design of high-sensitivity cantilever and its monolithic integration with CMOS circuits

IEEE Sensors Journal

Volumn 7, Issue 4, 2007, Pages 489-495

  Yu, Xiaomei ^a   Tang, Yaquan ^a   Zhang, Haitao ^a   Li, Ting ^a   Wang, Wei ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Cantilever; Monolithic integration; Post CMOS process; Silicon on insulator (SOI) CMOS

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; LOGIC DESIGN; MICROMACHINING; PIEZOELECTRIC DEVICES; SILICON ON INSULATOR TECHNOLOGY;

DIGITAL CONTROLLED MULTIPLEXERS; MICROCANTILEVER ARRAYS; PIEZORESISTIVE CANTILEVERS; READOUT CIRCUITRY;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 33847712977     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2007.891938     Document Type: Article

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