Kinetics of boron atoms in Ar-BCl3 flowing microwave discharges

Plasma Sources Science and Technology

Volumn 7, Issue 1, 1998, Pages 54-60

  Pierson, J F ^a   Czerwiec, T ^a   Belmonte, T ^a   Michel, H ^a   Ricard, A ^b  

^a INSTITUT JEAN LAMOUR   (France)

^b UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; BORON COMPOUNDS; CARRIER CONCENTRATION; ELECTRIC DISCHARGES; MICROWAVES; PLASMA APPLICATIONS; PLASMA DENSITY;

ACTIVE BORON PRODUCTION; KINETIC PROCESSES; MICROWAVE DISCHARGES;

PLASMA SOURCES;

EID: 0031998464     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/1/008     Document Type: Article

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