Ion energy distributions for the identification of active species and processes in low pressure hollow cathode discharges

Plasma Sources Science and Technology

Volumn 18, Issue 3, 2009, Pages

  Tanarro, I ^a   Herrero, V J ^a  

^a INSTITUTO DE ESTRUCTURA DE LA MATERIA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE SPECIES; ANODE POTENTIAL; COLLISION PROCESS; DC DISCHARGES; ENERGY DISTRIBUTIONS; HOLLOW CATHODE DISCHARGE; HOLLOW CATHODES; ION ENERGY DISTRIBUTIONS; ION PRODUCTION; LOW PRESSURES; QUADRUPOLE MASS SPECTROMETRY; RELATIVE ABUNDANCE; SHEATH REGIONS;

ELECTRIC POWER DISTRIBUTION; GAS MIXTURES; MASS SPECTROMETRY; REFLECTIVE COATINGS;

IONS;

EID: 68549088990     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/18/3/034007     Document Type: Article

References (69)

1. Röpcke J, Lombardi G, Rousseau A and Davies P B 2006 Plasma Sources Sci. Technol. 15 S148-68
2. Stancu G D, Pipa A V, Lombardi G, Davies P B, Gicquel A, Lavrov P B and Röpcke J 2005 Contrib. Plasma Phys. 45 358-68
3. Tanarro I, Sanz M M, Bermejo D, Domingo C and Santos J 1994 J. Chem. Phys. 100 238-46
4. Tanarro I, Sanz M M, Domingo C, Bermejo D, Santos J and Domenech J L 1994 J. Phys. Chem. 98 5862-6
5. de los Arcos T, Domingo C, Herrero V J, Sanz M M, Schulz A and Tanarro I 1998 J. Phys. Chem. A 102 6282-91
6. Tabarés F L, Tafalla D, Tanarro I, Herrero V J and Islyaikin A M 2004 Vacuum 73 161-7
7. Mutsukura N 2001 Plasma Chem. Plasma Process. 21 265
8. Sugai H, Kojima H, Ishida A and Toyoda H 1990 Appl. Phys. Lett. 56 2616-8
9. Sanz M M, Abad L, Herrero V J and Tanarro I 1992 J. Appl. Phys. 71 5372-5
10. Ferreira J A and Tabares F L 2007 J. Vac. Sci. Technol. A 25 246-51
11. Kang H D, Preuss R, Schwarz-Selinger T and Dose V 2002 J. Mass Spectrom. 37 748-54
12. Singh H, Coburn J W and Graves D B 2000 J. Vac. Sci. Technol. A 18 299-305
13. Tanarro I 2007 J. Phys. D: Appl. Phys. 40 2994-5
14. Hopf C, Jacob W and von Keudell A 2005 J. Appl. Phys. 97 094904
15. Schlüter M, Hopf C and Jacob W 2008 New J. Phys. 10 053037
16. Plagernann A, Ellmer K and Wiesemann K 2007 J. Vac. Sci. Technol. A 25 1341-50
17. Ellmer K, Wendt R and Wiesemann K 2003 Int. J. Mass Spectrom. 223 679-3
18. Zeuner M, Neumann H and Meichsner J 1997 J. Appl. Phys. 81 2985-94
19. Franke E et al 1997 Surf. Coat. Technol. 97 90-6
20. Snijkers R J M M et al 1996 J. Appl. Phys. 79 8982-92
21. Herrero V J, Islyaikin A M and Tanarro I 2008 J. Mass Spectrom. 43 1148-50
22. Castillo M, Méndez I, Islyaikin A M, Herrero V J and Tanarro I 2005 J. Phys. Chem. A 109 6255-63
23. Méndez I, Gordillo-Vzquez F J, Herrero V J and Tanarro I 2006 J. Phys. Chem. A 110 6060-6
24. Tanarro I, Herrero V J, Islyaikin A M, Méndez I, Tabarés F L and Tafalla D 2007 J. Phys. Chem. A 111 9003-12
25. Baguer N, Bogaerts A and Gijbels R 2003 J. Appl. Phys. 94 2212-22
26. de los Arcos T, Castillo M, Domingo C, Herrero V J, Sanz M M and Tanarro I 2000 J. Phys. Chem. A 104 8183-93
27. Sar-el HZ 1967 Rev. Sci. Instrum. 38 1210-6
28. Davis W D and Vanderslice T A 1963 Phys. Rev. 131 219-28
29. Seebock R J 1999 Surf. Coat. Technol. 116 564-7
30. Budtz-Jorgensen C V, Bottiger J and Kringhoj P 2000 Vacuum 56 9-13
31. Copeland F B M and Crothers D S F 1997 At. Data Nucl. Data Tables 65 273-88
32. Pullins S H, Dressler R A, Torrents R and Gerlich D 2000 Z. Phys. Chem. 214 1279-97
33. Neynaber R H and Tang S Y 1982 Chem. Phys. Lett. 92 556-9
34. Smith D, Adams N G, Alge A, Villinger H and Lindinger W 1980 J. Phys. B: At. Mol. Phys. 13 2787-99
35. Kersten H, Deutsch H, Steffen H, Kroesen G M W and Hippler R 2001 Vacuum 63 385-431
36. McCall B J and Oka T 2000 Science 287 1941-2
37. Jacob W, Hopf C, Meier M and Schwarz-Selinger T 2005 Nuclear Fusion Research-Understanding Plasma-Surface Interactions (Springer Series in Chemical Physics vol 78) (Heidelberg: Springer) pp 249-85
38. Phelps A V 1990 J. Phys. Chem. Ref. Data 19 653-75
39. Anicich V G 2003 J.P.L. Publication 03-19 NASA
40. Gentry R W, McClure D J and Douglass C H 1975 Rev. Sci. Instrum. 46 367-75
41. Hollmann E M and Pigarov A Y 2002 Phys. Plasmas 9 4330-9
42. Dunn G H and Kieffer L J 1963 Phys. Rev. 132 2109-17
43. Köllman K 1975 Int. J. Mass Spectrom. Ion. Phys. 17 261-285
44. Van Zyl B and Stephen T M 1994 Phys. Rev. A 50 3164-73
45. Van Brunt Jr 1977 Phys. Rev. A 16 1309-11
46. Tserepi A D and Miller T A 1994 J. Appl. Phys. 75 7231-6
47. Thomas L, Jauberteau J L, Jauberteau I, Aubreton J and Catherinot A 1997 Plasma Chem. Plasma Process. 17 193-206
48. van Helden J H, Wagemans W, Yagci G, Zijlmans R A B, Schram D C, Engeln R, Lombardi G, Stancu G D and Ropcke J 2007 J. Appl. Phys. 101 043305
49. Zijlmans R A B 2008 Molecule conversion in recombining plasmas-the role of radical-surface interactions PhD Thesis The Netherlands
50. http://www.ph1.uni-koeln.de/vorhersagen/
51. Locht R and Schopman J 1974 Int. J. Mass Spectrom. Ion Phys. 15 361-78
52. Locht R, Schopman J, Wankenne H and Momigny J 1975 Chem. Phys. 7 393-404
53. Van Brunt R J, Lawrence G M, Kieffer L J and Slater J M 1975 J. Chem. Phys. 61 2032-7
54. Van Brunt R J and Kieffer L J 1975 J. Chem. Phys. 63 3216-21
55. Tan K T, Brion C E, Van der Leeuw Ph E and Van der Wiel M J 1978 Chem. Phys. 29 299-309
56. Rejoub R, Lindsay B G and Stebbings R F 2001 J. Chem. Phys. 155 5053-8
57. Frémont F, Leclercq, Hajaji A, Naja A, Lemennais P, Boulbain S, Broquin V and Chesnel J-Y 2005 Phys. Rev. A 72 042702-1-4
58. Levine R D and Bernstein R B 1987 Molecular Reaction Dynamics and Chemical Reactivity (Oxford: Oxford University Press)
59. Franceschi P, Ascenzi D, Tosi P, Thissen R, Zabka J, Roithov J, Ricketts C L, De Simone M and Coreno M 2007 J. Chem. Phys. 126 134310
60. Franceschi P et al 2008 Int. J. Mass Spectrom. doi:10.1016/j.ijms.2008. 07.020
61. Church D A and Holzscheiter H M 1980 Chem. Phys. Lett. 76 109-12
62. Castillo M, Herrero V J, Méndez I and Tanarro I 2004 Plasma Sources Sci. Technol. 13 343-50
63. Jacob W 1998 Thin Solid Films 326 1
64. Gordillo-Vzquez F J, Herrero V J and Tanarro I 2007 Chem. Vapor. Depos. 13 267-79
65. Bauer M, Schwarz-Selinger T, Jacob W and von Keudell A 2005 J. Appl. Phys. 98 073302
66. Liu A Y and Cohen M L 1989 Science 245 841
67. Tabarés F L, Tafalla D, Tanarro I, Herrero V J, Islyaikin A and Maffiotte C 2002 Plasma Phys. Control. Fusion 44 L37-42
68. Tabarés F L, Tafalla D, Rohde V, Stamp M, Mathews G, Esser G, Philipps V, Doerner R and Baldwin M 2005 J. Nucl. Mater. 337-339 867-71
69. Schwarz-Selinger T, Hopf C, Sun C and Jacob W 2007 J. Nucl. Mater. 363 174-8