Energy spectra of particles bombarding the cathode in glow discharges

Vacuum

Volumn 56, Issue 1, 2000, Pages 9-13

  Budtz Jorgensen C V ^a   Bottiger J ^a   Kringhoj P ^a  

^a AARHUS UNIVERSITY   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CATHODES; CHARGE TRANSFER; ELECTRIC CURRENT MEASUREMENT; GLOW DISCHARGES; ION BOMBARDMENT; MASS SPECTROMETERS; MATHEMATICAL MODELS; PLASMA COLLISION PROCESSES; PRESSURE MEASUREMENT; VOLTAGE MEASUREMENT;

CHILD LAW;

BEAM PLASMA INTERACTIONS;

EID: 0033874406     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(99)00160-8     Document Type: Article

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