Simulation of the energy and angular distribution of Ar+ in d.c. sputtering discharges

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 564-567

  Seebock R J ^a  

^a MANNHEIM UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

Angular distribution; Ar discharge; Energy distribution; Ion d.c. sputtering; Monte Carlo simulations

Indexed keywords

ARGON; CATHODES; COMPUTER SIMULATION; ELECTRIC POTENTIAL; MONTE CARLO METHODS; PLASMA SHEATHS; PRESSURE EFFECTS; SPUTTER DEPOSITION;

ENERGY DISTRIBUTION;

GLOW DISCHARGES;

EID: 0033328893     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00097-3     Document Type: Article

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