Ion chemistry in cold plasmas of H2 with CH4 and N2

Journal of Physical Chemistry A

Volumn 111, Issue 37, 2007, Pages 9003-9012

  Tanarro, I ^a   Herrero, V J ^a   Islyaikin, A M ^a,c   Mendez I ^a   Tabare, F L ^b   Tafalla, D ^b  

^a INSTITUTO DE ESTRUCTURA DE LA MATERIA   (Spain)

^b LABORATORIO NACIONAL DE FUSIÓN   (Spain)

^c Mikron JSC   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONITRILE; CHARGE TRANSFER; MASS SPECTROMETRY; PROTONATION; REACTION RATES;

ADMIXTURES; GAS PHASES; ION MASS SPECTRA; REACTIVE COLLISIONS;

PLASMA SOURCES;

EID: 34948823388     PISSN: 10895639     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp073569w     Document Type: Article

References (75)

1. McCaIl, B. J.; Oka, T. Science 2000, 287, 1941.
2. +; Springer Proceedings in Physics; Springer: New York, 2004; p 37.
3. Milligan, D. B.; Wilson, P. F.; Freeman, C. G.; Meot-Ner (Mautner), M.; McEwan, M. J. J. Phys. Chem. A 2002, 106, 9745.
4. Herbst, E. Chem. Soc. Rev. 2001, 30, 168.
5. Herbst, E. J. Phys. Chem. A 2005, 109, 4017.
6. Petrie, S.; Bohme, D. K. Mass Spectrom. Rev. 2007, 26, 258.
7. Majed, T.; Waite, J. H.; Bougher, S. W.; Yelle, R. V.; Gladstone, G. R.; McConell, J. C.; Bhardwaj, A., Jr. Adv. Space Res. 2004, 33, 197.
8. Jacob, W. Thin Solid Films 1998, 326, 1.
9. Grill, A. Diamond Relat. Mater. 1999, 8, 428.
10. Lombardi, G.; Hassouni, K.; Stancu, G.-D.; Mechold, L.; Röpcke, J.; Giquel, A. J. Appl. Phys. 2005, 98, 053303.
11. Gordillo-Vázquez, F. J.; Herrero, V. J.; Tanarro, I. Chem. Vap. Deposition 2007, 13, 267.
12. Teii, K.; Hori, M.; Goto, T. J. Appl. Phys. 2002, 92, 4103.
13. Hopf, C.; von Keudell, A.; Jacob, W. J. Appl. Phys. 2003, 93, 3352.
14. Jacob, W.; Hopf, C.; von Keudell, A.; Meier, M.; Schwarz-Selinger, T. Rev. Sci. Instrum. 2003, 74, 5123.
15. Morrison, N. A.; William, C.; Milne, W. I. J. Appl. Phys. 2003, 94, 7031.
16. Bauer, M.; Schwarz-Selinger, T.; Jacob, W.; von Keudell, A. J. Appl. Phys. 2005, 98, 073302.
17. De Bleecker, K.; Bogaerts, A.; Goedheer, W. Phys. Rev. E 2006, 73, 026405.
18. Liu, A. Y.; Cohen, M. L. Science 1989, 245, 841.
19. Weber, F. R.; Oechsner, H. Thin Solid Films 1999, 355, 73.
20. Tabarés, F. L.; Rohde, V.; the ASDEX upgrade team. Plasma Phys. Control. Fusion 2004, 46, B381.
21. Federici, G.; Skinner, C. H.; Brooks, J. N.; Coad, J. P.; Grisolia, G.; Haasz, A. A.; Hassanein, A.; Philipps, V.; Pitcher, C. S.; Roth, J.; Wampler, W. R.; Whyte, D. G. Nucl. Fusion 2001, 41, 1967.
22. Counsell, G.; Coad, P.; Grisola, C.; Hopf, C; Jacob, W.; Kirshner, A.; Kreter, A.; Krieger, K.; Likonen, J.; Philipps, V.; Roth, J.; Rubel, M.; Salancon, E.; Semerok, E.; Tabares, F. L.; Widdowson, A.; JET EFDA contributors. Plasma Phys. Control. Fusion 2006, 48, B189.
23. Tabarés, F. L.; Tafalla, D.; Rohde, V.; Stamp, M.; Mathews, G.; Esser, G.; Philipps, V.; Doerner, R.; Baldwin, M. J. Nucl. Mater. 2005, 337-339, 867.
24. Jacob, W.; Hopf, C.; Schlüter. Schwarz-Selinger, T.; Sun. C. Optimisation of hydrocarbon redeposition reduction by tokamak-compatible scavenger techniques; EFDA Task TW3-TPP-SCAVOP, subtask 2; Final report, 2004.
25. Jacob, W.; Hopf, C.; Schlüter, M. Appl. Phys. Lett. 2005, 86, 201103.
26. Jacob, W.; Hopf, C.; Schlütter, M. Phys. Ser. 2006, T124, 32.
27. Tabarés, F. L.; Tafalla, D.; Tanarro, I.; Herrero, V. J.; Islyaikin, A.; Maffiotte, C. Plasma Phys. Control. Fusion 2002, 44, L37.
28. Tabarés, F. L.; Tafalla, D. Phys. Ser. 2003, T103, 47.
29. Tabarés, F. L.; Tafalla, D.; Tanarro, I.; Herrero, V. J.; Islyaikin, A. M. Vacuum 2004, 73, 161.
30. Schwarz-Selinger, T.; Hopf, C.; Sun, C.; Jacob, W. J. Nucl. Mater. 2007, 363, 174.
31. Shakhatov, V. A.; De Pascale, O.; Capitelli, M.; Hassouni, K.; Lombardi, G.; Gicquel, A. Phys. Plasmas 2005, 12, Art No 073301
32. Lavrov, B. P.; Melnikov, A. S.; Käning, M.; Röpcke, J. Phys. Rev. E 1999, 59, 3526.
33. Qing, Z.; Otorbaev, D. K.; Brussaard, G. J. H.; van de Sanden, M. C. M. J. Appl. Phys. 1996, 80, 1312.
34. Lavrov, B. P.; Osiac, M.; Pipa, A. V.; Röpcke, J. Plasma Sources Sci. Tech. 2003, 12, 576.
35. Pigarov, A. Yu. Phys. Ser. 2002, T96, 16.
36. Loureiro, J.; Ferreira, C. M. J. Phys. D: Appl. Phys. 1989, 22, 1680.
37. Hollman, E. M.; Pigarov, A. Yu. Phys. Plasmas 2002, 9, 4330.
38. Méndez, I.; Gordillo-Vázquez, F. J.; Herrero, V. J.; Tanarro, I. J. Phys. Chem. A 2006, 110, 6060.
39. Tabarés, F. L.; Ferreira, J. A.; Tafalla, D. Chem. Vap. Deposition 2007, 13, 335.
40. Castillo, M. Ph.D. Thesis, Espectrometría y cinética de plasmas fríos de óxidos de nitrógeno y aire, Madrid, Spain, 2004.
41. Castillo, M.; Méndez, L; Islyaikin, A. M.; Herrero, V. J.; Tanarro, I. J. Phys. Chem. A 2005, 109, 6225.
42. Pecher, P. Ph.D. Thesis, Quantitative Determination of the Particle Fluxes Emanating from Methane ECR Plasmas, Max-Planck-Institut Für Plasmaphysik, 1998.
43. Okada, K.; Komatsu, S. J. Appl. Phys. 1998, 84, 6923.
44. de los Arcos, T.; Domingo, C.; Herrero, V. J.; Sanz, M. M.; Schulz, A.; Tanarro, I. J. Phys. Chem. A 1998, 102, 6282.
45. Castillo, M.; Herrero, V. J.; Tanarro, I. Plasma Sources Sci. Tech. 2002, 11, 368.
46. Lieberman, M. A.; Lichtenberg; A. J. Principles of plasma discharges and materials processing; John Wiley & Sons: New York, 1994.
47. Wronski, Z. Vacuum 1989, 39, 941.
48. Kang, D. H.; Preuss, R.; Schwarz-Selinger, T.; Dose, V. J. Mass Spectrom. 2002, 37, 748.
49. Misina, M.; Pokorny, P. Surf. Coat. Technol 2003, 173, 914.
50. Dolezal, V.; Dvorak, P.; Janea, J. Czech. 1. Phys. 2006, 56, B697.
51. Mutsukura, N. Plasma Chem. Plasma Process. 2001, 27, 265.
52. Kareev, M.; Sablier, M.; Fujii, T. J. Phys. Chem. A 2000, 104, 7218.
53. Gordiets, B.; Ferreira, C. M.; Pinheiro, M. J.; Ricard, A. Plasma Sources Sci. Technol. 1998, 7, 363.
54. Gordiets, B.; Ferreira, C. M.; Pinheiro, M. J.; Ricard, A. Plasma Sources Sci. Technol. 1998, 7, 379.
55. Tatarova, E.; Dias, F. M.; Gordiets, B.; Ferreira, C. M. Plasma Sources Sci. Technol. 2005, 14, 19.
56. van Helden, J. P., Ph.D. Thesis, The generation of molecules through plasma-surface interactions, Eindhoven University, The Netherlands, 2006.
57. Matyash, K.; Schneider, R.; Bergmann, A.; Jacob, W.; Fantz, U.; Pecher, P. J. Nucl. Mater. 2003, 313-316, 434.
58. Anicich, V. G. J. Phys. Chem. Ref. Data 1993, 22, 1469.
59. Anicich, V. G. J.P.L. Publication 03-19, NASA, 2003.
60. Janev, R.; Reiter, D. Juel-Report 3966: Collision Processes of Hydrocarbon Species in Hydrogen Plasmas: I. Methane Family and JuelReport 4005: Collision Processes of Hydrocarbon Species in Hydrogen Plasmas: II. Ethane & Propane Families, http://www.eirene.de/html/ a_m_data.html
61. Tanarro, I.; de los Arcos, T.; Domingo, C.; Herrero, V. J.; Sanz, M. M. Vacuum 2002, 64, 457.
62. http://physics.nist.gov/PhysRefData/Ionization/molTable.html.
63. Mul, M. P.; Mitchell, J. B. A.; D'Angelo, V. S.; McGowan, J. Wm.; Froelich, H. R. J. Phys. B: At. Mol. Phys.1981, 14, 1353.
64. Kossyi, I. A.; Kosstinsky, Y.; Matveyev, A. A.; Silakov, V. Plasma Sources Sci. Technol. 1992, 1, 207.
65. Atkinson, R.; Baulch, D. L.; Cox, R. A.; Hampson, R. F., Jr.; Kerr, J. A.; Rossi, M. J.; Troe, J. J. Phys. Chem. Ref. Data 1999, 28, 191.
66. Wesley, F.; Herron, J. T.; Hampson, R. F.; Mallard, W. G. Eds. NIST Chemical Kinetics Database; U.S. Department of Commerce: Gaithersburg, MD, 1992.
67. Asvany, O.; Kumar, P.; Redlich, B.; Hegemann, I.; Schlemmer, S.; Marx, D. Science 2005, 309, 1219.
68. Huang, X.; McCoy, A. B.; Bowman, J. B.; Johnson, L. M.; Savage, C.; Dong, F.; Nesbitt, D. J. Science 2006, 311, 60.
69. Ahlberg, P.; Karlsson, A.; Goeppert, A.; Nilsson Lill, S. O.; Dinér, P.; Sommer, J. Chem. Eur. J 2001, 7, 1936.
70. Maret, S.; Bergin, E. A.; Lada, C. J. Nature 2006, 44, 425.
71. Hempel, F.; Davies, P. B.; Loffhagen, D.; Mechold, L.; Röpcke, J. Plasma Sources Sci. Technol. 2003, 12, S98.
72. Hempel, F. Ph.D. Thesis, Absorption spectroscopy studies in low pressure non equilibrium molecular plasmas using tuneable infrared diode lasers, Greifswald, Germany, 2004.
73. Hong, J.; Turban, G. Diamond Relat. Mater. 1999, 8, 572.
74. Ferreira, J. A.; Tabarés, F. L. J. Vac. Sci Technol, A 2007, 25, 246.
75. Turner, B. E.; Amano, T.; Feldman, P. A. Astrophys. J 1990, 349, 376.