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Volumn 131, Issue 4, 2009, Pages

On the mechanism of H atom production in hot filament activated H 2 and CH4 / H2 gas mixtures

Author keywords

[No Author keywords available]

Indexed keywords

ATOM FORMATION; DESORPTION PROCESS; DIAMOND GROWTH; DISSOCIATIVE ADSORPTION; FILAMENT TEMPERATURE; GAS PRESSURES; H-ATOM DENSITY; HOT FILAMENT; IN-SITU MEASUREMENT; POWER CONSUMPTION; TWO-STEP MECHANISMS;

EID: 68249109825     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3180816     Document Type: Article
Times cited : (30)

References (75)
  • 1
    • 33947465686 scopus 로고
    • 0002-7863, () and references therein. 10.1021/ja02168a002
    • I. Langmuir, J. Am. Chem. Soc. 0002-7863 37, 417 (1915) and references therein. 10.1021/ja02168a002
    • (1915) J. Am. Chem. Soc. , vol.37 , pp. 417
    • Langmuir, I.1
  • 2
    • 14044261337 scopus 로고
    • 0950-1207, () and references therein. 10.1098/rspa.1959.0071
    • D. Brennan and P. C. Fletcher, Proc. R. Soc. London, Ser. A 0950-1207 250, 389 (1959) and references therein. 10.1098/rspa.1959.0071
    • (1959) Proc. R. Soc. London, Ser. A , vol.250 , pp. 389
    • Brennan, D.1    Fletcher, P.C.2
  • 3
    • 0040939687 scopus 로고
    • 0066-426X,. 10.1146/annurev.pc.42.100191.003235
    • F. G. Celii and J. E. Butler, Annu. Rev. Phys. Chem. 0066-426X 42, 643 (1991). 10.1146/annurev.pc.42.100191.003235
    • (1991) Annu. Rev. Phys. Chem. , vol.42 , pp. 643
    • Celii, F.G.1    Butler, J.E.2
  • 6
    • 36749083399 scopus 로고    scopus 로고
    • Deposition of new microcrystalline materials, μc-SiC, μc-GeC by HWCVD and solar cell applications
    • DOI 10.1016/j.tsf.2007.06.043, PII S0040609007009844, Proceedings of the Fourth International Conference on Hot-Wire Cat-CVD Process
    • M. Konagai, Thin Solid Films 0040-6090 516, 490 (2008) and references therein. 10.1016/j.tsf.2007.06.043 (Pubitemid 350213017)
    • (2008) Thin Solid Films , vol.516 , Issue.5 , pp. 490-495
    • Konagai, M.1
  • 7
    • 36749103152 scopus 로고    scopus 로고
    • Recent situation of industrial implementation of Cat-CVD technology in Japan
    • DOI 10.1016/j.tsf.2007.06.190, PII S0040609007009856, Proceedings of the Fourth International Conference on Hot-Wire Cat-CVD Process
    • H. Matsumura and K. Ohdaira, Thin Solid Films 0040-6090 516, 537 (2008) and references therein. 10.1016/j.tsf.2007.06.190 (Pubitemid 350213018)
    • (2008) Thin Solid Films , vol.516 , Issue.5 , pp. 537-540
    • Matsumura, H.1    Ohdaira, K.2
  • 9
    • 33644879453 scopus 로고    scopus 로고
    • 0925-9635,. 10.1016/j.diamond.2005.08.042
    • J. Zimmer and K. V. Ravi, Diamond Relat. Mater. 0925-9635 15, 229 (2006). 10.1016/j.diamond.2005.08.042
    • (2006) Diamond Relat. Mater. , vol.15 , pp. 229
    • Zimmer, J.1    Ravi, K.V.2
  • 10
    • 33750462394 scopus 로고    scopus 로고
    • The versatility of hot-filament activated chemical vapor deposition
    • DOI 10.1016/j.tsf.2006.07.073, PII S0040609006008790
    • L. Schäfer, M. Höfer, and R. Kröger, Thin Solid Films 0040-6090 515, 1017 (2006). 10.1016/j.tsf.2006.07.073 (Pubitemid 44648258)
    • (2006) Thin Solid Films , vol.515 , Issue.3 , pp. 1017-1024
    • Schafer, L.1    Hofer, M.2    Kroger, R.3
  • 13
    • 0025521566 scopus 로고
    • 0884-2914,. 10.1557/JMR.1990.2433
    • M. Sommer and F. W. Smith, J. Mater. Res. 0884-2914 5, 2433 (1990). 10.1557/JMR.1990.2433
    • (1990) J. Mater. Res. , vol.5 , pp. 2433
    • Sommer, M.1    Smith, F.W.2
  • 14
    • 0026202588 scopus 로고
    • Carburization of tungsten and tantalum filaments during low-pressure diamond deposition
    • DOI 10.1016/0257-8972(91)90329-U
    • S. Okoli, R. Haubner, and B. Lux, Surf. Coat. Technol. 0257-8972 47, 585 (1991). 10.1016/0257-8972(91)90329-U (Pubitemid 21710900)
    • (1991) Surface and Coatings Technology , vol.47 , Issue.1-3 , pp. 585-599
    • Okoli, S.1    Haubner, R.2    Lux, B.3
  • 15
    • 0000407485 scopus 로고
    • 0021-8979,. 10.1063/1.357492
    • D. S. Dandy and M. E. Coltrin, J. Appl. Phys. 0021-8979 76, 3102 (1994). 10.1063/1.357492
    • (1994) J. Appl. Phys. , vol.76 , pp. 3102
    • Dandy, D.S.1    Coltrin, M.E.2
  • 17
    • 36749060001 scopus 로고    scopus 로고
    • Filament seasoning and its effect on the chemistry prevailing in hot filament activated gas mixtures used in diamond chemical vapour deposition
    • DOI 10.1016/j.tsf.2007.06.114, PII S0040609007009789, Proceedings of the Fourth International Conference on Hot-Wire Cat-CVD Process
    • D. W. Comerford, U. F. S. D'Haenens-Johansson, J. A. Smith, M. N. R. Ashfold, and Yu. A. Mankelevich, Thin Solid Films 0040-6090 516, 521 (2008). 10.1016/j.tsf.2007.06.114 (Pubitemid 350213013)
    • (2008) Thin Solid Films , vol.516 , Issue.5 , pp. 521-525
    • Comerford, D.W.1    D'Haenens-Johansson, U.F.S.2    Smith, J.A.3    Ashfold, M.N.R.4    Mankelevich, Y.A.5
  • 19
  • 34
    • 33646868794 scopus 로고    scopus 로고
    • Gas-phase characterization in diamond hot-filament CVD by infrared tunable diode laser absorption spectroscopy
    • DOI 10.1016/j.vacuum.2005.12.009, PII S0042207X0600011X
    • J. Hirmke, F. Hemple, G. D. Stancu, J. Ropcke, S. M. Rosiwal, and R. F. Singer, Vacuum 0042-207X 80, 967 (2006). 10.1016/j.vacuum.2005.12.009 (Pubitemid 43783364)
    • (2006) Vacuum , vol.80 , Issue.9 , pp. 967-976
    • Hirmke, J.1    Hempel, F.2    Stancu, G.D.3    Ropcke, J.4    Rosiwal, S.M.5    Singer, R.F.6
  • 35
    • 0000813262 scopus 로고
    • 0003-6951,. 10.1063/1.105276
    • W. L. Hsu, Appl. Phys. Lett. 0003-6951 59, 1427 (1991). 10.1063/1.105276
    • (1991) Appl. Phys. Lett. , vol.59 , pp. 1427
    • Hsu, W.L.1
  • 44
    • 0000333057 scopus 로고    scopus 로고
    • Two-dimensional simulation of a hot-filament chemical vapor deposition reactor
    • DOI 10.1016/0925-9635(95)00493-9
    • Y. A. Mankelevich, A. T. Rakhimov, and N. V. Suetin, Diamond Relat. Mater 5, 888 (1996). 10.1016/0925-9635(95)00493-9 (Pubitemid 126378764)
    • (1996) Diamond and Related Materials , vol.5 , Issue.9 , pp. 888-894
    • Mankelevich, Y.A.1    Rakhimov, A.T.2    Suetin, N.V.3
  • 46
    • 0035270104 scopus 로고    scopus 로고
    • Experimental data vs. 3-D model calculations of HFCVD processes: Correlations and discrepancies
    • DOI 10.1016/S0925-9635(00)00419-2, PII S0925963500004192
    • Y. A. Mankelevich, N. V. Suetin, M. N. R. Ashfold, J. A. Smith, and E. Cameron, Diamond Relat. Mater. 0925-9635 10, 364 (2001). 10.1016/S0925-9635(00) 00419-2 (Pubitemid 32477542)
    • (2001) Diamond and Related Materials , vol.10 , Issue.3-7 , pp. 364-369
    • Mankelevich, Yu.A.1    Suetin, N.V.2    Ashfold, M.N.R.3    Smith, J.A.4    Cameron, E.5
  • 51
    • 0004204702 scopus 로고
    • 2nd ed. (Clarendon, Oxford).
    • J. Emsley, The Elements, 2nd ed. (Clarendon, Oxford, 1989).
    • (1989) The Elements
    • Emsley, J.1
  • 54
    • 0029307848 scopus 로고
    • 0042-207X,. 10.1016/0042-207X(94)00100-6
    • J. Stobinski and R. Dus, Vacuum 0042-207X 46, 433 (1995). 10.1016/0042-207X(94)00100-6
    • (1995) Vacuum , vol.46 , pp. 433
    • Stobinski, J.1    Dus, R.2
  • 56
    • 33646379101 scopus 로고    scopus 로고
    • Hydrogen dissociation on high-temperature tungsten
    • DOI 10.1016/j.susc.2006.03.032, PII S0039602806002615
    • W. Zheng and A. Gallagher, Surf. Sci. 0039-6028 600, 2207 (2006). 10.1016/j.susc.2006.03.032 (Pubitemid 43674413)
    • (2006) Surface Science , vol.600 , Issue.10 , pp. 2207-2213
    • Zheng, W.1    Gallagher, A.2
  • 57
    • 0037174216 scopus 로고    scopus 로고
    • Structural changes of tungsten heating filaments during CVD of diamond
    • DOI 10.1016/S0921-5093(01)01933-5, PII S0921509301019335
    • E. Zeiler, S. Schwarz, S. M. Rosiwal, and R. F. Singer, Mater. Sci. Eng., A 0921-5093 335, 236 (2002). 10.1016/S0921-5093(01)01933-5 (Pubitemid 34923324)
    • (2002) Materials Science and Engineering A , vol.335 , Issue.1-2 , pp. 236-245
    • Zeiler, E.1    Schwarz, S.2    Rosiwal, S.M.3    Singer, R.F.4
  • 59
  • 61
    • 35848953179 scopus 로고    scopus 로고
    • edited by M. W. Chase, Jr. (American Chemical Society, AIP and NIST, Washington, DC); J. Phys. Chem. Ref. Data Monogr. 1063-0651 (1998).
    • NIST-JANAF Thermochemical Tables, 4th ed., edited by, M. W. Chase, Jr., (American Chemical Society, AIP and NIST, Washington, DC, 1998); M. W. Chase, Jr. J. Phys. Chem. Ref. Data Monogr. 1063-0651 9 (1998).
    • (1998) NIST-JANAF Thermochemical Tables, 4th Ed. , vol.9
  • 64
    • 0016049521 scopus 로고
    • 0039-6028,. 10.1016/0039-6028(74)90035-1
    • S. M. Ko and L. D. Schmidt, Surf. Sci. 0039-6028 42, 508 (1974). 10.1016/0039-6028(74)90035-1
    • (1974) Surf. Sci. , vol.42 , pp. 508
    • Ko, S.M.1    Schmidt, L.D.2
  • 65
    • 0346697348 scopus 로고
    • in, edited by C. H. Bamford, C. F. H. Tipper, and R. G. Compton (Elsevier, New York), Vol.,.
    • M. A. Morris, M. Bowker, and D. A. King, in Comprehensive Chemical Kinetics, edited by, C. H. Bamford, C. F. H. Tipper, and, R. G. Compton, (Elsevier, New York, 1984), Vol. 19, p. 1.
    • (1984) Comprehensive Chemical Kinetics , vol.19 , pp. 1
    • Morris, M.A.1    Bowker, M.2    King, D.A.3
  • 67
    • 0006301145 scopus 로고
    • 0021-9606,. 10.1063/1.1730513
    • G. Ehrlich, J. Chem. Phys. 0021-9606 31, 1111 (1959). 10.1063/1.1730513
    • (1959) J. Chem. Phys. , vol.31 , pp. 1111
    • Ehrlich, G.1
  • 69
    • 0040470633 scopus 로고
    • edited by I. S. Grigoriev and E. Z. Meilihov (Energoatomizdat, Moscow).
    • Handbook of Physical Data, edited by, I. S. Grigoriev, and, E. Z. Meilihov, (Energoatomizdat, Moscow, 1991).
    • (1991) Handbook of Physical Data
  • 71
    • 0004079079 scopus 로고    scopus 로고
    • in, edited by J. Lipkowski and P. N. Ross (Wiley-Interscience, New York), Cha.
    • K. Christmann, in Electrocatalysis, edited by, J. Lipkowski, and, P. N. Ross, (Wiley-Interscience, New York, 1998), Chap..
    • (1998) Electrocatalysis
    • Christmann, K.1
  • 72
    • 33947322679 scopus 로고    scopus 로고
    • Microcrystalline, nanocrystalline, and ultrananocrystalline diamond chemical vapor deposition: Experiment and modeling of the factors controlling growth rate, nucleation, and crystal size
    • DOI 10.1063/1.2696363
    • P. W. May, M. N. R. Ashfold, and Yu. A. Mankelevich, J. Appl. Phys. 0021-8979 101, 053115 (2007). 10.1063/1.2696363 (Pubitemid 46439925)
    • (2007) Journal of Applied Physics , vol.101 , Issue.5 , pp. 053115
    • May, P.W.1    Ashfold, M.N.R.2    Mankelevich, Yu.A.3


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