Deposition of new microcrystalline materials, μc-SiC, μc-GeC by HWCVD and solar cell applications

Thin Solid Films

Volumn 516, Issue 5, 2008, Pages 490-495

  Konagai, Makoto ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Amorphous materials; Cubic SiC; Deposition process; Hot wire deposition; Microcrystalline materials; Solar cells

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; SOLAR CELLS;

CUBIC SIC; DEPOSITION PROCESS; HOT-WIRE DEPOSITION; THERMAL ANNEALING;

MICROCRYSTALLINE SILICON;

EID: 36749083399     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.043     Document Type: Article

References (31)

1. Bauer S., Schroder B., Herbst W., and Lill M. Proceedings of 2nd World Conference on Photovoltaic Energy Conversion, Vienna (1998) 363
2. Kumar P., Kupich M., Dusane R.O., Grunsky D., and Schroder B. Proceedings of 20th European Photovoltaic Solar Energy Conference, Barcelona (2005) 1521
3. Kupich M., Kumar P., Dusane R.O., Schwender N., Grunsky D., and Schroeder B. Proceedings of 20th European Photovoltaic Solar Energy Conference, Barcelona (2005) 1679
4. Kumar P., Kupich M., Grunsky D., Dusane R.O., and Schroeder B. Abstracts for ICANS21, Lisbon (2005) 411
5. Schroeder B., Kupich M., Kumar P., and Grunsky D. Extended Abstracts, 4th International Conference on Hot-Wire CVD (Cat-CVD) Process, Oct. 4-8, Takayama, FrB01 (2006) 187
6. Franken R.H., van der Werf C.H.M., Loffler J., Rath J.K., and Schropp R.E.I. Thin Solid Films 501 (2006) 47
7. Franken R.H., Yu H., Lin Y., Stolk R.L., van der Werf C.H.M., Rath J.K., and Schropp R.E.I. Proceedings of 20th European Photovoltaic Solar Energy Conference, Barcelona (2005) 1588
8. van Veen M.K., van Veenendaal P.A.T.T., van der Werf C.H.M., Rath J.K., and Schropp R.E.I. J. Non-Cryst. Solids 299-302 (2002) 1194
9. van Veen M.K., and Schropp R.E.I. Thin Solid Films 403-404 (2002) 135
10. Schropp R.E.I. Thin Solid Films 451-452 (2004) 455
11. Verlaan V., van der Werf C.H.M., Arnoldbik W.M., Rieffe H.C., Romijn I.G., Soppe W.J., Weeber A.W., Goldbach H.D., and Schropp R.E.I. Proc. 20th European Photovoltaic Solar Energy Conference, Barcelona (2005) 1434
12. Klein S., Finger F., Carius R., Wagner H., and Stutzmann M. Thin Solid Films 395 (2001) 305
13. Klein S., Finger F., Carius R., Rech B., Houben L., Luysberg M., and Stutzmann M. Mater. Res. Soc. Symp. Proc. 715 (2002) A26.2.1
14. Klein S., Finger F., Carius R., Kluth O., Baia Neto A.L., Wagner H., and Stutzmann M. Proc. 17th European Photovoltaic Solar Energy Conference, Munich (2001) 2965
15. Wang Q., Iwaniczko E., Xu Y., Gao W., Nelson N.P., Mahan A.H., Crandall R.S., and Branz H.M. Mater. Res. Soc. Symp. Proc. 609 (2000) A4.3.1
16. Wang Q., Iwaniczko E., Yang J., Lord K., and Guha S. Mater. Res. Soc. Symp. Proc. 664 (2001) A7.5.1
17. Schropp R.E.I., Xu Y., Iwaniczko E., Zaharias G.A., and Mahan H. Mater. Res. Soc. Symp. Proc. 715 (2002) A26.3.1
18. Wang T., Iwaniczko E., Page M., Wang Q., Xu Y., Yan Y., Roybal L., Levi D., Bauer R., Yelundur V., Rohatgi A., and Branz H. Abstracts for 4th World Conference on Photovoltaic Energy Conversion, Hawaii (2006) 41
19. Nonomura S., Yoshida N., and Itoh T. Thin Solid Films 501 (2006) 164
20. Ogawa S., Okabe M., Ikeda Y., Itoh T., Yoshida N., and Nonomura S. 4th International Conference on Hot-Wire CVD (Cat-CVD) Process, Gifu (2006) FrA03(HW4-017)
21. Ide Y., Asakusa K., Yamada A., and Konagai M. Jpn. J. Appl. Phys. 42 (2003) 1521
22. Miyajima S., Yamada A., and Konagai M. Thin Solid Films 430 (2003) 274
23. M. Konagai, private communication.
24. Ide Y., Saito Y., Yamada A., and Konagai M. Jpn. J. Appl. Phys. 43 (2004) 7953
25. Konagai M., Hiza S., Ohki K., and Yamada A. Proc. 3rd World Conference on Photovoltaic Energy Conversion, Osaka (2003) 1605
26. Banerjee C., Haga K., Miyajima S., Yamada A., and Konagai M. Abstracts for 4th World Conference on Photovoltaic Energy Conversion, Hawaii (2006) 189
27. Miyajima S., Yamada A., and Konagai M. Jpn. J. Appl. Phys. 43 (2004) L1190
28. In: Harris G.L. (Ed). Properties of Silicon Carbide (1995), INSPEC, Institution of Electrical Engineers, London 88 Chap. 4
29. Miyajima S., Haga K., Yamada A., and Konagai M. Jpn. J. Appl. Phys. 45 (2006) L432
30. Yashiki Y., Miyajima S., Yamada A., and Konagai M. Thin Solid Films 501 1-2 (2005) 202
31. S. Miyajima, M. Sawamura, A. Yamada, M. Konagai, WCPEC-4, May 7-12, Hawaii (2006) 10:30 AM, Tue, May 09-Area 5.