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Volumn 354, Issue 19-25, 2008, Pages 2117-2120
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Investigation of surface treatment effect of catalyst on the lifetime for Cat-CVD method
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Author keywords
Catalytic chemical vapor deposition; Silicon
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Indexed keywords
CARBONIZATION;
CATALYST ACTIVITY;
CHEMICAL VAPOR DEPOSITION;
DEPOSITION;
INDUSTRIAL APPLICATIONS;
CARBONIZED TUNGSTEN (W) CATALYZER;
CATALYTIC CHEMICAL VAPOR DEPOSITION;
SILICIDE LAYER THICKNESS;
AMORPHOUS SILICON;
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EID: 42649130034
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2007.10.073 Document Type: Article |
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Times cited : (3)
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References (6)
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