Experimental investigation and computational modeling of hot filament diamond chemical vapor deposition

Journal of Chemical Physics

Volumn 107, Issue 15, 1997, Pages 5918-5928

  Zumbach, Volker ^a   Schäfer, Jörg ^a   Tobai, Jens ^a   Ridder, Michael ^a   Dreier, Thomas ^a   Schaich, Thomas ^a   Wolfrum, Jürgen ^a   Ruf, Bernhard ^a   Behrendt, Frank ^a   Deutschman, Olaf ^a   Warnatz, Jürgen ^a  

^a UNIVERSITY OF HEIDELBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000170060     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.474317     Document Type: Article

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