Filament seasoning and its effect on the chemistry prevailing in hot filament activated gas mixtures used in diamond chemical vapour deposition

Thin Solid Films

Volumn 516, Issue 5, 2008, Pages 521-525

  Comerford, Dane W ^a   D'Haenens Johansson, Ulrika F S ^b   Smith, James A ^a   Ashfold, Michael N R ^a   Mankelevich, Yuri A ^c  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

^b UNIVERSITY OF WARWICK   (United Kingdom)

^c MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

Diamond chemical vapour deposition; Gas phase laser diagnostics; H atoms; Hot filament; Hot wire activation; Surface modification

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; GAS MIXTURES; HEAT TREATMENT; SURFACE CHEMISTRY;

ATOM NUMBER DENSITIES; DIAMOND CHEMICAL VAPOUR DEPOSITION; GAS PHASE LASER DIAGNOSTICS; H ATOMS; HOT FILAMENTS; HOT-WIRE ACTIVATION;

THIN FILMS;

EID: 36749060001     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.114     Document Type: Article

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