Experimental data vs. 3-D model calculations of HFCVD processes: Correlations and discrepancies

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 364-369

  Mankelevich, Yu A ^a   Suetin, N V ^a   Ashfold, M N R ^b   Smith, J A ^b   Cameron, E ^b  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

Hot filament CVD; Hydrocarbon chemistry; Modelling; REMPI measurements

Indexed keywords

CARBON INORGANIC COMPOUNDS; CHEMICAL VAPOR DEPOSITION; HYDROGEN INORGANIC COMPOUNDS;

GAS MIXTURES;

DIAMONDS;

VAPOR DEPOSITION;

EID: 0035270104     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00419-2     Document Type: Article

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