Electrical and optical characteristics of high-power pulsed sputtering glow discharge

IEEE Transactions on Plasma Science

Volumn 37, Issue 7 SPEC. ISS. PART 1, 2009, Pages 1178-1188

  Azuma, Kingo ^a   Mieda, Ryosuke ^b   Yukimura, Ken ^b   Tamagaki, Hiroshi ^c   Okimoto, Tadao ^c  

^a UNIVERSITY OF HYOGO   (Japan)

^b DOSHISHA UNIVERSITY   (Japan)

^c KOBE STEEL LTD   (Japan)

Author keywords

Glow discharge; High power impulse magnetron sputtering (HIPIMS); High power pulsed MS (HPPMS); High power pulsed sputtering (HPPS); Ion sheath; Penning discharge; Pulsed discharge plasma; Sputtering

Indexed keywords

HIGH-POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); HIGH-POWER PULSED MS (HPPMS); HIGH-POWER PULSED SPUTTERING (HPPS); ION SHEATH; PENNING DISCHARGE; PULSED DISCHARGE PLASMA;

ARGON; ATOMS; EARTHQUAKE EFFECTS; ELECTRIC FIELDS; ELECTRIC GENERATORS; ELECTRIC POTENTIAL; ELECTRIC POWER UTILIZATION; GLOW DISCHARGES; IONIZATION OF GASES; MAGNETIC FIELDS; MAGNETRONS; METALS; OPTICAL MATERIALS; PLASMA DENSITY; PLASMA SHEATHS; PLASMA SOURCES; PLASMA THEORY; PLATE METAL; POWER CONTROL; SMELTING; SPECTROMETRY; TARGETS; TITANIUM;

IONS;

EID: 67949109534     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2009.2021838     Document Type: Article

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