Method for pulsed magnetron deposition of diamondlike films on large-area substrates

Russian Physics Journal

Volumn 42, Issue 12, 1999, Pages 1032-1038

  Bugaev, S P ^a   Oskomov, K V ^a   Podkovyrov, V G ^a   Smaikina, S V ^a   Sochugov, N S ^a  

^a INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 53149110476     PISSN: 10648887     EISSN: 15739228     Source Type: Journal    
DOI: 10.1007/BF02512416     Document Type: Article

References (10)

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